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首页> 外文期刊>World Journal of Engineering and Technology >Design of Reduced Graphene Oxide Based Piezo-Resistive Type Acoustic Sensor on Flexible Kapton for Underwater Applications
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Design of Reduced Graphene Oxide Based Piezo-Resistive Type Acoustic Sensor on Flexible Kapton for Underwater Applications

机译：水下应用中基于还原石墨烯的压电电阻型压电传感器的设计

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Micro Electro Mechanical Systems (MEMS) vector sensor is a recent advancement in the field of underwater acoustic sensors. The major incentive provided by this acoustic vector sensor is that it provides information about the direction of the incoming acoustic source signal in addition to the measurement of the pressure associated with the acoustic signal. We are reporting a design of a MEMS acoustic vector sensor for underwater applications using piezoresistive film of Reduced Graphine Oxide (RGO), realized on kapton (polyimide) film as the starting material. The sensor is designed and fabricated by deposition of RGO on a kapton, which is a flexible substrate by the method of drop casting making the process simple, low-cost and scalable. The application of the piezoresistive transduction principle and ingenious structure of the vector sensor based on bionic principle improves miniaturization and the low-frequency sensitivity. The fabricated sensor shows a repeatable response in both static and dynamic conditions, to the applied strain due to the acoustic signal in a given direction. The experimental results show that fabricated sensor based on MEMS technology and piezoresistive effect is feasible and it possesses intrinsic two-dimensional directivity. The fabricated device has given good response for the low-frequency acoustic signals due to the effect of piezoresistive transduction principle and the resonance frequency of the device is found to be around 80 Hz with the displacement sensitivity around 3 mV/mm and 2 mV/mm of X and Y axis directions respectively.
机译：微机电系统（MEMS）矢量传感器是水下声传感器领域的最新进展。该声矢量传感器提供的主要诱因是，除了测量与声信号相关的压力外，它还提供有关传入声源信号方向的信息。我们正在报告一种设计用于水下应用的MEMS声矢量传感器的设计，该传感器使用氧化还原石墨烯（RGO）的压阻膜作为初始材料，并以kapton（聚酰亚胺）膜实现。通过将RGO沉积在kapton上来设计和制造传感器，该kapton是通过滴铸法制成的柔性基板，从而使该过程简单，低成本且可扩展。压阻转导原理和基于仿生原理的矢量传感器的巧妙结构的应用提高了小型化和低频灵敏度。由于在给定方向上的声信号，所制造的传感器在静态和动态条件下均表现出对所施加应变的可重复响应。实验结果表明，基于MEMS技术和压阻效应的传感器是可行的，具有固有的二维方向性。由于压阻转导原理的影响，制成的器件对低频声音信号具有良好的响应，并且发现器件的谐振频率约为80 Hz，位移灵敏度约为3 mV / mm和2 mV / mm分别为X和Y轴方向。

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