...
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Jordan Journal of Mechanical and Industrial Engineering >Synthesis of Hard Coatings and Nano Modification with Ion Implantation
【24h】

Synthesis of Hard Coatings and Nano Modification with Ion Implantation

机译：硬涂层的合成及离子注入纳米改性

获取原文
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

In this paper, we present the results of a study of TiN films which are deposited by a Physical Vapor Deposition and Ion Beam Assisted Deposition. In the present investigation the subsequent ion implantation was provided with N~(2+) ions. The ion implantation was applied to enhance the mechanical properties of surface. The film deposition process exerts a number of effects such as crystallographic orientation, morphology, topography, densification of the films. The evolution of the microstructure from porous and columnar grains to denser packed grains is accompanied by changes in mechanical and physical properties. A variety of analytic techniques were used for characterization, such as scratch test, calo test, SEM, AFM, XRD and EDAX. The experimental results indicated that the mechanical hardness is elevated by penetration of nitrogen, whereas the Young's modulus is significantly elevated.
机译：在本文中，我们介绍了通过物理气相沉积和离子束辅助沉积沉积的TiN薄膜的研究结果。在本研究中，随后的离子注入提供了N〜（2+）离子。进行离子注入以增强表面的机械性能。膜沉积过程会产生许多影响，例如晶体学取向，形态，形貌，膜致密化。从多孔和柱状晶粒到密实堆积晶粒的微观结构演变伴随着机械和物理性能的变化。表征使用了多种分析技术，例如划痕测试，色度测试，SEM，AFM，XRD和EDAX。实验结果表明，通过渗入氮可以提高机械硬度，而杨氏模量则可以明显提高。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号