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首页> 外文期刊>Journal of Theoretical and Applied Information Technology >COMPARATIVE ANALYSIS OF MEMS CAPACITIVE PRESSURE SENSOR FOR DETECTION OF TREMORS IN PARKINSON?S DISEASE
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COMPARATIVE ANALYSIS OF MEMS CAPACITIVE PRESSURE SENSOR FOR DETECTION OF TREMORS IN PARKINSON?S DISEASE

机译：MEMS电容式压力传感器在帕金森病中检测残端的比较分析

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摘要

In this paper, we are proposing a novel high sensitive, more reliable structure for an accelerometer sensor with silicon material which detects the resting tremor (continues tremor or Pill rolling tremor) of a patient suffering from Parkinson?s Disease. The essential tremor frequency is from 3Hz to 7Hz. The Proposed structure is simulated using COMSOL Multi Physics 5.0 CAD tool and results are compared with the different shaped proof mass with different materials of a moving part of sensor. The minimum range of Eigen frequency that the proposed structure got 2.3572Hz and the maximum range is 8.679Hz with a displacements of 1.04μm to 2.74 μm. It is evident that now a days only the clinical based tests are the conventional tests to detect the severity of the tremor for Parkinson?s Disease as per the UPDRS. In this paper we are proposing the new methodology to detect the resting tremor of Patient which is the initial symptom of the Parkinson?s Disease. It is clear from the results that the Silicon material for proof mass gives the best sensitivity values when compared to all the materials of polymers. The capacitive actuation technique is proposed in this paper to identify the output capacitance and voltage because it gives high sensitivity and accuracy and reliability.
机译：在本文中，我们提出了一种新颖的高灵敏度，更可靠的结构，用于硅材料加速度传感器，可检测帕金森氏病患者的静息震颤（连续震颤或药丸滚动震颤）。基本震颤频率为3Hz至7Hz。使用COMSOL Multi Physics 5.0 CAD工具对拟议的结构进行了仿真，并将结果与​​具有不同材质的传感器运动部件的不同形状的证明质量进行了比较。该结构的本征频率最小范围为2.3572Hz，最大范围为8.679Hz，位移为1.04μm至2.74μm。显然，现在只有基于临床的检查才是根据UPDRS检测帕金森氏病震颤严重程度的常规检查。在本文中，我们提出了一种新的方法来检测患者的静息震颤，这是帕金森氏病的最初症状。从结果可以明显看出，与所有聚合物材料相比，用于质量证明的硅材料具有最佳的灵敏度值。本文提出了一种电容驱动技术来识别输出电容和电压，因为它具有很高的灵敏度，准确性和可靠性。

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