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A Feedback Controlled MEMS Probe Scanner for On-chip AFM

机译：用于片上AFM的反馈控制MEMS探头扫描仪

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摘要

Atomic force microscope (AFM) provides a unique possibility in nanoscience research and development for interrogation and manipulation of matter at nanoscale. Miniaturization of AFM significantly reduces the manufacturing cost and breaks the barrier to widespread adoption of this scientific instrument. This paper presents the characterization and control of a novel microelectromechanical system (MEMS)-based AFM. For in-plane motion, the device is equipped with a micro stage with integrated electrostatic actuators and electrothermal sensors. For use in taping-mode AFM imaging, a microcantilever is embedded within the device, featuring a piezoelectric layer for actuation. Positive position feedback (PPF) controller is used to attenuate the highly resonant dynamics of the stage. Scanning performance of device is evaluated by tracking a raster pattern where a 50 Hz triangular signal is applied to the actuators along the X axis. To reduce the tracking error, turnaround points of triangular signal are smoothed by using an optimization method. Moreover, the closed-loop bandwidth is increased with inversion-based feedforward technique. A 50Hz optimal reference signal combined with an inversion-based feedforward technique results in a fivefold decrease in root mean square of tracking error compared with triangular reference signal.
机译：原子力显微镜（AFM）在纳米科学研究和发展中为质询和操纵物质提供了独特的可能性。原子力显微镜的微型化极大地降低了制造成本，并打破了该科学仪器被广泛采用的障碍。本文介绍了一种新型的基于微机电系统（MEMS）的AFM的特性和控制。对于平面运动，该设备配备了一个微型平台，该平台集成了静电致动器和电热传感器。为了在录音模式的AFM成像中使用，微悬臂被嵌入设备中，并具有用于致动的压电层。正位置反馈（PPF）控制器用于衰减平台的高度共振动态。通过跟踪光栅图案来评估设备的扫描性能，其中沿X轴向执行器施加50 Hz三角信号。为了减小跟踪误差，通过使用优化方法来平滑三角信号的转折点。此外，通过基于反转的前馈技术可以增加闭环带宽。与三角形参考信号相比，50Hz最佳参考信号与基于反转的前馈技术相结合，可使跟踪误差的均方根降低五倍。

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