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A method for driving a mems - mirror scanner, a method for driving a mems - actuation in front of the direction of the scanner and a method for controlling the rotational angle of a mems - actuating device
A method for driving a mems - mirror scanner, a method for driving a mems - actuation in front of the direction of the scanner and a method for controlling the rotational angle of a mems - actuating device
A method for driving a mems - mirror scanner with an electrostatic actuating device, comprising a step of the drive of the electrostatic actuator according to one input signal, corresponding to a drive shafts form, which is obtained by the following equation:if if wherein b / i, k / i, (1 / i) · dcL(Θ) / d ⊖ and (1 / i) · dcR(Θ) / d ⊖ parameters to obtain the drive shafts form are, θ (t) a desired mirror angle response, i is a moment of inertia of a moving part comprising a mirror is, 2b is a damping factor (damping coefficient), κ is a spring constant, c.L(Θ), cR(Θ) angular dependencies of an electrical capacitance, vB a constant pretension during the differential drive is known, and c+''(Θ) and c-''(Θ) is equal to 1 / 2 of the sum or the difference of the derivation of the first order of cL(Θ) and cR(With respect to θ, θ), which are shown by the following equations: , (8), (9).
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机译：一种具有静电致动装置的镜反射镜扫描器的驱动方法，包括以下步骤：根据与驱动轴形式相对应的一个输入信号来驱动静电致动器，该输入信号通过以下等式获得： / i，k / i，（1 / i）·dc L （Θ）/ d⊖和（1 / i）·dc R （Θ）/ d⊖获得驱动轴形式的参数为θ（t）所需的镜面角度响应，i为包括镜面的运动部件的惯性矩为，2b为阻尼系数（阻尼系数），κ为弹簧常数， c。 L （Θ），c R （Θ）电容的角度依赖性，v B 在差分驱动期间的恒定预紧力为c + ''（Θ）和c -''（Θ）等于和的1/2或第一个的导数之差c L （Θ）和c R （相对于θ，θ）的顺序，由以下等式显示：，（8），（9）。
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