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MEMS MEMS Driving Method for MEMS Mirror Scanner and Driving Device for MEMS Mirror Scanner using the method thereof
MEMS MEMS Driving Method for MEMS Mirror Scanner and Driving Device for MEMS Mirror Scanner using the method thereof
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机译:用于MEMS镜扫描仪的MEMS驱动方法及使用该方法的MEMS镜扫描仪的驱动装置
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摘要
The present invention relates to a MEMS mirror scanner driving method in which a mirror can rotate around an x-axis and a y-axis perpendicular to the same. The method comprises the steps of: obtaining a transfer function (T (f)) of a MEMS mirror scanner; setting a target time series output signal (d(t)) for mirror driving of the MEMS mirror scanner; converting the target time series output signal (o(t)) into an output signal (D(f)) of a Fourier target frequency domain; obtaining an input signal (V(f)) of a frequency domain from the target frequency domain output signal (D(f)) and the transfer function (T(f)) of the MEMS mirror scanner; converting the input signal (V(f)) of the frequency domain into a time series input signal (v(t)); and applying the time series input signal (v(t)) as a driving voltage to the MEMS mirror scanner. The present invention can effectively suppress unwanted residual vibration appearing in an output.
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