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首页> 外文期刊>RSC Advances >Infrared microlenses and gratings of chalcogenide: confined self-organization in solution processed thin liquid films
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Infrared microlenses and gratings of chalcogenide: confined self-organization in solution processed thin liquid films

机译：硫族化物的红外微透镜和光栅：溶液处理的薄液膜中的局限自组织

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This work demonstrates the fabrication of chalcogenide microstructures such as gratings, lenses and needles using a lithographically directed, evaporative self-organization of chalcogenide thin liquid films for the first time. Using a two-step annealing protocol, excess solvent of freshly coated ChG films is eliminated and then the liquid films are patterned using elastomeric masters with continuous or disconnected features during solvent evaporation. Although microcontact printing or capillary flow lithography has been proven to be useful to create continuous gratings and waveguide like structures in solid films, our method overcomes the limitation of structural continuity of the generated pattern and uses self-organization of solute ChG within the master's confinement to produce isolated microstructures. Fabrication of disjointed arrays of microlenses of various dimensions as well as conical shaped needles in ChG thin films has been demonstrated for relevant optical IR applications. This methodology establishes evaporative self-organization of ChG thin films as a viable alternative to creating microstructures in bulk ChG with hot-embossing, bypassing the need for ultra high temperature processing.
机译：这项工作首次证明了使用硫族化物薄膜的光刻指导，蒸发自组织来制造硫族化物微结构，例如光栅，透镜和针。使用两步退火方案，可以消除新涂覆的ChG膜中多余的溶剂，然后在溶剂蒸发过程中使用具有连续或不连续特征的弹性体母版对液膜进行构图。尽管已证明微接触印刷或毛细管流动光刻技术可用于在固体膜中创建连续的光栅和类似波导的结构，但我们的方法克服了所生成图案的结构连续性的局限性，并在母版的限制范围内使用了溶质ChG的自组织。产生孤立的微观结构。已经证明，在相关的光学红外应用中，已在ChG薄膜中制造了各种尺寸的微透镜分离的阵列以及锥形针。这种方法建立了ChG薄膜的自蒸发自组织，是通过热压印在批量ChG中创建微结构的可行替代方法，从而无需进行超高温处理。

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