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Growth and properties of ZnO nanorods by RF-sputtering for detection of toxic gases

机译：射频溅射检测有毒气体中ZnO纳米棒的生长和性能

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There is a strong demand for nanostructured materials prepared by an industrially-scalable technique. The current work is devoted to the preparation of ZnO polycrystalline nanorods using RF sputtering at 400 °C and Sn droplets as a catalyzer layer, for highly sensitive gas sensors. Nanorods with diameters ranging from 100 to 200 nm can be tailored by changing the RF power and the deposition time. Raman and PL spectroscopy indicate that the material obtained is ZnO, with a characteristic emission spectrum in the UV region and in the visible. The functional properties of the ZnO nanorods were investigated by studying the response to CBRN (acetonitrile and DMMP), explosive (H _(2) ), and pollutant gases (H _(2) S, acetone, and NO _(2) ) in the temperature range 200–500 °C. The sensors showed good response to reducing gases at higher temperatures (500 °C) and to NO _(2) at lower temperature (200 °C).
机译：对于通过工业规模化技术制备的纳米结构材料有强烈的需求。当前的工作致力于通过在400°C下使用RF溅射和Sn滴作为催化剂层的高灵敏度气体传感器来制备ZnO多晶纳米棒。可以通过更改RF功率和沉积时间来定制直径范围为100至200 nm的纳米棒。拉曼光谱和PL光谱表明，所获得的材料为ZnO，在紫外区域和可见光中具有特征发射光谱。通过研究对CBRN（乙腈和DMMP），爆炸物（H _（2））和污染物气体（H _（2）S，丙酮和NO _（2）的响应，研究了ZnO纳米棒的功能特性。在200–500°C的温度范围内。传感器在较高温度（500°C）下对还原性气体表现出良好的响应，而在较低温度（200°C）下对NO _（2）表现出良好的响应。

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