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Bridged oxide nanowire device fabrication using single step metal catalyst free thermal evaporation

机译:使用单步无金属催化剂热蒸发的桥接氧化物纳米线器件制造

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In this study, indium-tin-zinc-oxide (ITZO) and Zn doped In _(2) O _(3) nanowires were directly grown as bridged nanowires between two heavily doped silicon (Si) electrodes on an SOI wafer using single step vapor–solid–solid (VSS) growth method. SEM analysis showed highly dense and self aligned nanowire formation between the Si electrodes. Electrical and UV response measurements were performed in ambient condition. Current–voltage characteristics of devices exhibited both linear and non-linear behavior. This was the first demonstration of bridged ITZO and Zn-doped In _(2) O _(3) nanowires. Our results show that bridged nanowire growth technique can be a potential candidate for high performance electronic and optoelectronic devices.
机译:在这项研究中,铟锡锌氧化物(ITZO)和Zn掺杂的In_(2)O _(3)纳米线通过一步法直接生长为SOI晶片上两个重掺杂硅(Si)电极之间的桥接纳米线。汽固固(VSS)生长法。 SEM分析表明,硅电极之间形成了高度致密且自对准的纳米线。在环境条件下进行电和紫外线响应测量。器件的电流-电压特性表现出线性和非线性行为。这是桥接ITZO和掺杂Zn的In_(2)O_(3)纳米线的首次演示。我们的结果表明,桥接纳米线生长技术可以成为高性能电子和光电设备的潜在候选者。

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