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首页> 外文期刊>RSC Advances >Flexible piezocapacitive sensors based on wrinkled microstructures: toward low-cost fabrication of pressure sensors over large areas
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Flexible piezocapacitive sensors based on wrinkled microstructures: toward low-cost fabrication of pressure sensors over large areas

机译：基于皱纹微结构的柔性压电电容传感器：面向低成本大面积制造压力传感器

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摘要

Flexible pressure sensors are a key component of electronic skin (e-skin) for use in future applications ranging from human healthcare monitoring to robotic skins and environmental risk detection. Here, we demonstrated the development of a highly sensitive, simple, and low-cost capacitive pressure sensor, which acted as a flexible capacitive dielectric, based on a microstructured elastomeric template that could be fabricated over a large area. To achieve this goal, the dielectric template was prepared simply by stretching and releasing a flexible Ecoflex film to produce wrinkled surface microstructures with a feature size on the order of tens of micrometers. The effects of the wrinkled surface microstructure on the sensing performance were systematically investigated by comparing the nonwrinkled film, one-side wrinkled film, and double-side wrinkled film. The response and release times of the double-side wrinkled pressure sensor were improved by 42% and 25% in comparison with the values obtained from the unwrinkled case, respectively. These results showed that the introduction of wrinkled surface microstructures to the elastomeric template efficiently enhanced the pressure sensor performance. We also demonstrated that our sensor could be used to detect a variety of changes in the surroundings, such as variations in the angle of a stimulus, object loading/unloading, or an exhaled breath.
机译：柔性压力传感器是电子皮肤（e-skin）的关键组件，可用于从人类健康监护到机器人皮肤以及环境风险检测等未来应用中。在这里，我们展示了一种高灵敏，简单且低成本的电容式压力传感器的开发，该传感器基于可在大面积上制造的微结构化弹性体模板，充当了柔性电容性电介质。为了实现该目标，仅通过拉伸和释放柔性的Ecoflex膜以产生具有数十微米量级的特征尺寸的起皱的表面微结构来制备介电模板。通过比较无皱纹膜，单面皱纹膜和双面皱纹膜，系统地研究了皱纹表面微观结构对传感性能的影响。双面起皱压力传感器的响应时间和释放时间与未起皱情况相比分别提高了42％和25％。这些结果表明，将褶皱的表面微结构引入弹性体模板可有效地提高压力传感器的性能。我们还证明了我们的传感器可用于检测周围环境的各种变化，例如刺激角度的变化，物体的装载/卸载或呼气。

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