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FLEXIBLE PRESSURE SENSOR BASED ON HEMISPHERIC MICROSTRUCTURE AND FABRICATION METHOD THEREFOR
FLEXIBLE PRESSURE SENSOR BASED ON HEMISPHERIC MICROSTRUCTURE AND FABRICATION METHOD THEREFOR
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机译：基于半球微结构的柔性压力传感器及其制造方法
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摘要
The present invention is applicable to the technical field of flexible pressure sensors, and disclosed thereby is a flexible pressure sensor based on a hemispheric microstructure and a fabrication method therefor. The flexible pressure sensor comprises a PDMS flexible substrate layer, a carbon nanotube thin film and a PDMS flexible thin film layer, wherein the PDMS flexible substrate layer is provided with a microstructure, the microstructure is a spherical convex shape, a surface of the micro structure provided on the PDMS flexible substrate layer is covered by the carbon nanotube thin film, and the carbon nanotube thin film is arranged between the PDMS flexible substrate layer and the PDMS flexible thin film layer and is provided with an electrode connected thereto. The fabrication method is used for fabricating the described flexible pressure sensor. The flexible pressure sensor based on a hemispheric microstructure and fabrication method therefor as provided by the present invention improve the measurement range and sensitivity of the flexible pressure sensor and reduce the response time.
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