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Sensing mechanism of an ionization gas temperature sensor based on a carbon nanotube film

机译：基于碳纳米管薄膜的电离气体温度传感器的传感机理

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摘要

In this paper, we propose a novel ionized gas temperature sensor which has a triple-electrode structure and carbon nanotubes (CNTs) as a field emission cathode. The measurement current, as part of the non-self-sustaining discharge current, changes with the changing of initial emission current I0 and Townsend's first ionization coefficient α according to the theory of Townsend discharge. The ionization coefficient α increases with increasing gas temperature for a given gas at a certain electric field because the mean free path is proportional to the gas temperature. In addition, the initial current increases with increasing gas temperature. Experimental results showed that the collecting current exhibited an exponential increase with the gas temperature rising from 20 °C to 110 °C and the sensitivity is 4.74 μA °C?1 to air and 22.72 μA °C?1 to nitrogen at 110 °C. The difference in the effective work function after nitrogen and oxygen adsorption is the response for the different sensitivities. The triple-electrode ionization sensor is a new mechanism of gas temperature measurement and has the merit of facilitating the fabrication of CNTs compared with the existing CNT-based resistive or thermal expansion temperature sensors.
机译：在本文中，我们提出了一种新型的电离气体温度传感器，该传感器具有三电极结构和碳纳米管（CNT）作为场发射阴极。作为非自持放电电流的一部分，测量电流会随着初始发射电流 I 0 和汤森德（Townsend）的变化而变化根据汤森放电理论，电离系数α。对于给定气体，在一定电场下，电离系数α随气体温度的升高而增加，因为平均自由程与气体温度成正比。另外，初始电流随着气体温度的升高而增加。实验结果表明，随着气体温度从20°C升高到110°C，集电极电流呈指数增加，对空气的敏感性为4.74μA°C ？1 并在110°C下将22.72μA°C ？1 降至氮气。氮和氧吸附后有效功函数的差异是对不同灵敏度的响应。三电极电离传感器是气体温度测量的一种新机制，与现有的基于CNT的电阻式或热膨胀温度传感器相比，它具有促进CNT制备的优点。

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