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A comprehensive optical analysis of nanoscale structures: from thin films to asymmetric nanocavities

机译：纳米级结构的全面光学分析：从薄膜到不对称纳米腔

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摘要

A simple and robust method able to evaluate and predict, with high accuracy, the optical properties of single and multi-layer nanostructures is presented. The method was implemented using a COMSOL Multiphysics simulation platform and it has been validated by four case studies with increasing numerical complexities: (i) a single thin layer (20 nm) of Ag deposited on a glass substrate; (ii) a metamaterial composed of five bi-layers of Ag/ITO (indium tin oxide), with a thickness of 20 nm each; (iii) a system based on a three-material unit cell (AZO/ITO/Ag), but without any thickness periodicity (AZO stands for Al _(2) O _(3) /zinc oxide); (iv) an asymmetric nanocavity (thin-ITO/Ag/thick-ITO/Ag). A thorough study of this latter configuration reveals peculiar metamaterial effects that can widen the actual scenario in nanophotonic applications. Numerical results have been compared with experimental data provided by real ellipsometric measurements performed on the above mentioned ad hoc fabricated nanostructures. The obtained agreement is excellent, suggesting this research as a valid design approach to realize multi-band metamaterials able to work in a broad spectral range.
机译：提出了一种简单而可靠的方法，该方法能够以高精度评估和预测单层和多层纳米结构的光学性质。该方法是使用COMSOL Multiphysics仿真平台实现的，并且通过四个案例研究得到了验证，这些案例的数值复杂度不断提高：（i）在玻璃基板上沉积一层Ag的单薄层（20 nm）; （ii）由五层双层的Ag / ITO（铟锡氧化物）组成的超材料，每层的厚度为20 nm; （iii）基于三材料晶胞（AZO / ITO / Ag）但没有任何厚度周期性的系统（AZO代表Al _（2）O _（3）/氧化锌）; （iv）不对称的纳米腔（薄ITO / Ag /厚ITO / Ag）。对后一种配置的透彻研究表明，特有的超材料效应可以扩大纳米光子应用中的实际情况。数值结果已经与通过对上述特别制造的纳米结构进行的实际椭偏测量提供的实验数据进行了比较。获得的协议非常好，这表明该研究是实现能够在较宽光谱范围内工作的多波段超材料的有效设计方法。

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