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首页> 外文期刊>Bulletin of the American Physical Society >APS -APS March Meeting 2017 - Event - Patterning and Thinning of Black Phosphorus with Scanning Probe Nanolithography
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APS -APS March Meeting 2017 - Event - Patterning and Thinning of Black Phosphorus with Scanning Probe Nanolithography

机译：APS -APS 2017年3月会议-活动-使用扫描探针纳米光刻技术对黑色磷进行图案形成和稀释

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Two-dimensional (2D) black phosphorus (BP) has attracted significant interest due to its desirable electronic and optical properties. The preparation of thin BP layers primarily relies on exfoliation without precise control over flake size and thickness. We take advantage of the high chemical reactivity of BP in ambient conditions to realize patterning and layer-by-layer thinning of BP with conductive atomic force microscopy. It allows BP flakes to be locally patterned with lateral spatial resolution down to the extasciitilde 10 nm scale. The locally oxidized phosphorus getters environmental water, resulting in a liquid-phase patterning byproduct that is easily removed by water rinsing. We further demonstrate an alternating current bias method that enables direct patterning of BP on dielectric substrates for device fabrication. Using this method, BP field-effect transistors with patterned channels show significant improvement in current modulation by up to a factor of 50. The generality of this patterning method suggests that it can be extended to other 2D materials, thereby facilitating fundamental research and device prototyping (X. Liu, M. C. Hersam, extit{et al}. extit{Advanced Materials}, 2016, DOI: 10.1002/adma.201604121).
机译：二维（2D）黑磷（BP）由于其理想的电子和光学特性而引起了人们的极大兴趣。薄的BP层的制备主要依靠剥落，而不能精确控制薄片的大小和厚度。我们利用BP在环境条件下的高化学反应性，通过导电原子力显微镜实现BP的图案化和逐层减薄。它可以使BP薄片以横向空间分辨率低至10 nm的水平进行局部图案化。局部氧化的吸磷剂会吸收环境中的水，从而形成液相图案化副产物，很容易通过水冲洗将其除去。我们进一步演示了一种交流偏置方法，该方法能够在介电基片上对BP进行直接图案化以进行器件制造。使用这种方法，具有构图沟道的BP场效应晶体管在电流调制方面显示出高达50倍的显着改善。这种构图方法的普遍性表明它可以扩展到其他2D材料，从而有助于基础研究和器件原型设计（X. Liu，MC Hersam，extit {et al..extit {Advanced Materials}，2016，DOI：10.1002 / adma.201604121）。

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