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首页> 外文期刊>Plasma and Fusion Research >The Effect of Thermal History on Microstructure of Er2O3 Coating Layer Prepared by MOCVD Process
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The Effect of Thermal History on Microstructure of Er2O3 Coating Layer Prepared by MOCVD Process

机译：热史对MOCVD工艺制备的ER2O3涂层微观结构的影响

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摘要

Er2O3 is a high potential candidate material for tritium permeation barrier and electrical insulator coating for advanced breeding blanket systems with liquid metal or molten-salt types. Recently, Hishinuma et al. reported to form homogeneous Er2O3 coating layer on the inner surface of metal pipe using Metal Organic Chemical Vapor Deposition (MOCVD) process. In this study, the influence of thermal history on microstructure of Er2O3 coating layer on stainless steel 316 (SUS 316) substrate by MOCVD process was investigated using SEM, TEM and XRD. The ring and net shape selected-area electron diffraction (SAED) patterns of Er2O3 coating were obtained each SUS substrates, revealed that homogeneous Er2O3 coating had been formed on SUS substrate diffraction patterns. Close inspection of SEM images of the surface on the Er2O3 coating before and after thermal cycling up to 700?C in argon atmosphere, it is confirmed that the Er2O3 particles were refined by thermal history. The column-like Er2O3 grains were promoted to change to granular structure by thermal history. From the cross-sectional plane of TEM observations, the formation of interlayer between Er2O3 coating and SUS substrate was also confirmed.
机译：ER 2 O 3 是一种高潜在的候选材料，用于具有液态金属或熔盐类型的高级养殖橡皮布系统的氚渗透屏障和电绝缘体涂层。最近，Hishinuma等人。据报道，使用金属有机化学气相沉积（MOCVD）工艺在金属管内表面上形成均匀的ER <亚次> 2 O <亚> 3 涂层。在该研究中，使用SEM，TEM研究了MOCVD工艺对不锈钢316（SUS 316）基板上的ER 2 O 3 涂层的微观结构的影响和XRD。获得ER 2 O 3 涂层的环和净形状的区域电子衍射（SAED）图案，显示均匀的ER 2 O 3 涂层。在氩气氛中的热循环之前和之后的ER 2 O 3 涂层上的表面的SEM图像的近距离检查。确认ER 2 O 3 颗粒通过热历史改进。促进柱状ER <亚> 2 O 3 晶粒以通过热历史改变成颗粒结构。从TEM观察的横截面，还确认了ER 2 o 3 涂层和sus衬底之间的中间层的形成。

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