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首页> 外文期刊>RSC Advances >Manganese oxide films with controlled oxidation state for water splitting devices through a combination of atomic layer deposition and post-deposition annealing
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Manganese oxide films with controlled oxidation state for water splitting devices through a combination of atomic layer deposition and post-deposition annealing

机译：具有控制氧化状态的氧化锰膜，用于水分裂装置通过原子层沉积和沉积后退火

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Solar hydrogen devices combine the power of photovoltaics and water electrolysis to produce hydrogen in a hybrid form of energy production. To engineer these into integrated devices ( i.e. a water splitting catalyst on top of a PV element), the need exists for thin film catalysts that are both transparent for solar light and efficient in water splitting. Manganese oxides have already been shown to exhibit good water splitting performance, which can be further enhanced by conformal coating on high surface-area structures. The latter can be achieved by atomic layer deposition (ALD). However, to optimize the catalytic and transparency properties of the water splitting layer, an excellent control over the oxidation state of the manganese in the film is required. So far MnO, Mn _(3) O _(4) and MnO _(2) ALD have been shown, while Mn _(2) O _(3) is the most promising catalyst. Therefore, we investigated the post-deposition oxidation and reduction of MnO and MnO _(2) ALD films, and derived strategies to achieve every phase in the MnO–MnO _(2) range by tuning the ALD process and post-ALD annealing conditions. Thin film Mn _(2) O _(3) is obtained by thermal reduction of ALD MnO _(2) , without the need for oxidative high temperature treatments. The obtained Mn _(2) O _(3) is examined for solar water splitting devices, and compared to the as-deposited MnO _(2) . Both thin films show oxygen evolution activity and good solar light transmission.
机译：太阳能氢气装置将光伏和水电解的功率结合在一起以杂种形式的能量产生生产氢。将这些设备工程到集成装置中（即PV元件顶部的水分解催化剂），需要薄膜催化剂，其既透明为太阳能灯和有效的水分裂。已经显示锰氧化物表现出良好的水分裂性能，可以通过在高表面结构上的共形涂层进一步增强。后者可以通过原子层沉积（ALD）来实现。然而，为了优化水分解层的催化和透明性，需要对薄膜中锰的氧化状态的优异控制。到目前为止MNO，Mn _（3）o _（4）和MnO _（2）ALD已经显示出，而Mn _（2）O _（3）是最有前途的催化剂。因此，我们研究了通过调整ALD工艺和后α的退火条件通过调整MNO-MNO _（2）范围中达到MNO和MNO _（2）ALD薄膜的沉积后氧化和降低MNO和MNO _（2）族族膜，并衍生策略。薄膜Mn _（2）o _（3）通过抗氧化物MnO _（2）的热量来获得，而无需氧化高温处理。检查所得Mn _（2）O _（3）用于太阳能水分裂装置，并与沉积的MNO _（2）进行比较。这两种薄膜都显示出氧气进化活动和良好的太阳透光。

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