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Effect of Target Sintering Temperature on the Morphological and Optical Properties of Pulsed Laser Deposited TiO2 Thin Films

机译：靶烧结温度对脉冲激光沉积TiO2薄膜形态学和光学性质的影响

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In this paper, we report on the effect of titanium dioxide (TiO2) target sintering temperature on the morphological and optical properties of amorphous titanium dioxide thin films synthesized by pulsed laser deposition (PLD) on indium tin oxide (ITO) glass substrate and subsequently heat-treated in air at low temperature (150 °C). Three types of targets were used, unsintered (pressed at room temperature), sintered at 500 °C and sintered at 1000 °C. The surface morphology of the samples was investigated by scanning electron microscopy (SEM), and profilometry was used for thickness measurements. The structural properties of the films were examined by X-ray diffraction (XRD), while their optical properties were studied by UV?vis spectroscopy. The obtained TiO2 thin films have an amorphous nature, as shown by XRD analysis. Profilometer showed that sintered target samples have more reliable thicknesses than unsintered ones. The SEM studies revealed the sufficient structural homogeneity of sintered target nanosized TiO2 films and agglomerates in the case of unsintered target film. The UV?vis transmittance spectra showed high transparency in the visible range of PLD films, proportional to the target sintering temperature. The optical band gaps of the films deposited using the 500 °C and 1000 °C sintered targets are closer to those of anatase and rutile phases, respectively, which provides a promising approach to the challenges of amorphous TiO2-based nanostructures.
机译：在本文中，我们报告了二氧化钛（TiO2）靶烧结温度对通过脉冲激光沉积（PLD）在氧化铟锡（ITO）玻璃基板上合成的非晶二氧化钛薄膜的形态学和光学性质的影响及随后加热 - 在低温（150℃）的空气中进行处理。使用三种类型的靶，未烧成（在室温下按压），在500℃下烧结并在1000℃下烧结。通过扫描电子显微镜（SEM）研究样品的表面形态，并且使用轮廓测量法用于厚度测量。通过X射线衍射（XRD）检查薄膜的结构性质，同时通过UVα研究其光学性质。VIS光谱学。所获得的TiO 2薄膜具有无定形性质，如XRD分析所示。 Profileom表示烧结靶样品比未烧成的厚度更可靠。 SEM研究揭示了在未烧结的靶膜的情况下烧结靶纳米型TiO2膜和附聚物的充分结构均匀性。 UVΔVis透射谱在PLD膜的可见范围内显示出高透明度，与目标烧结温度成比例。使用500℃和1000℃烧结靶沉积的薄膜的光带间隙分别更接近锐钛矿和金红石相的光带，这为基于非晶TiO 2的纳米结构的挑战提供了有希望的方法。

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