首页>
外国专利>
TARGET FIXING UNIT FOR APPARATUS FOR FABRICATING PULSED LASER THIN FILM TO INCREASE THICKNESS OF THIN FILM AND EASILY REPLACE TARGET
TARGET FIXING UNIT FOR APPARATUS FOR FABRICATING PULSED LASER THIN FILM TO INCREASE THICKNESS OF THIN FILM AND EASILY REPLACE TARGET
展开▼
机译：用于制造脉冲激光薄膜以增加薄膜的厚度和容易更换的目标的设备的目标固定单元
展开▼
页面导航
摘要
著录项
相似文献
摘要
PURPOSE: A target fixing unit for an apparatus for fabricating a pulsed laser thin film is provided to increase the thickness of a thin film by rotating a target in a predetermined position at all times without a variation of the position of the target, and to easily replace the target by enabling the attachment/detachment of the target. CONSTITUTION: An opening(105b) to which one surface of a target for a thin film is exposed is formed in the center of the body of a target fixing member(105) including a reference surface(104a) in which the edge of the target is closely attached to the edge of the opening. A target support part(101) includes an elastic bias unit(103) that presses the other surface of the target to closely attach the target to the reference surface, coupled to the target fixing member. A driving axis(108) is positioned on the vertical line passing through the surface of the target, coupled to the target support part.
展开▼
