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首页> 外文期刊>Coatings >Improvement of the Microstructure and X-ray Performance of Ultrathin Ru/C Multilayer Mirror after High Temperature Treatment
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Improvement of the Microstructure and X-ray Performance of Ultrathin Ru/C Multilayer Mirror after High Temperature Treatment

机译：高温处理后超薄Ru / C多层镜子的微观结构和X射线性能的提高

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Ru/C multilayer mirrors with a period of 2.5 nm and 150 bilayers were studied under high-temperature annealing and long-term storage. A general increase in the reflectivity was observed after annealing at different temperatures from 300 to 700 °C, during which a maximum enhancement of around 14% was obtained at 600 °C. The highest reflectance measured at 8 keV reached 69% after 600 °C annealing. This was accompanied by a 6% expansion of the layer period, which could be mainly attributed to carbon layers. The surface roughness was not affected by the annealing, whereas the polycrystallization of Ru with crystallographic planes parallel to the layer interfaces was enhanced. Combining the transmission-electron microscopy measurements, it was found that the interdiffusion at the C-on-Ru interface was significantly suppressed. The decreased interdiffusion, enhanced optical contrast, and larger multilayer period were the main reasons for the increased reflectance. The 600 °C annealed Ru/C multilayer remained intact after 13 months of storage in air, which also demonstrated significant temporal stability.
机译：在高温退火和长期储存下，研究了具有2.5nm和150个双层的多层镜的Ru / C多层镜。在从300至700℃的不同温度下退火后观察到反射率的一般增加，在此期间在600℃下获得约14％的最大增强。在600°C退火后，在8KeV测量的最高反射率达到69％。这伴随着层周期的6％，这可能主要归因于碳层。表面粗糙度不受退火的影响，而平行于层界面的结晶平面的Ru的多晶化得到增强。结合透射电子显微镜测量，发现C-ON-RU界面处的相互积分受到显着抑制。减少的相互积分，增强的光学对比度和更大的多层期是增加反射率的主要原因。在空气中储存13个月后，600°C退火的Ru / C多层保持完整，这也表现出显着的时间稳定性。

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