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首页> 外文期刊>Physica status solidi, B. Basic research >Co/Mo_2C multilayer as X-ray mirror: Optical and thermal performances
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Co/Mo_2C multilayer as X-ray mirror: Optical and thermal performances

机译：Co / Mo_2C多层作为X射线镜：光学和热性能

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We combined soft X-ray reflectivity (SXR) and X-ray standingwave-enhanced fluorescence to study the optical performance and the thermally-induced interface behavior of Co/Mo_2C nanometric multilayers, designed to work in the soft X-ray range close to the Co L3 absorption edge. Grazing X-ray reflectivity measurements were performed at 0.154 nm (Cu Kα line) and at two wavelengths in the soft X-ray range, 1.59 and 1.33 nm, close to and far from the Co L3 edge. In the fluorescence experiment the intensity of the Co Lα emission was measured by the standing-wave method within a Co/Mo_2C stack. We found that the Co/Mo_2C multilayers present good optical performance in the soft X-ray range up to 600 8C annealing temperature. Indeed, the reflectivity value in the soft X-ray range at a grazing angle of 118 is 25% for the asdeposited sample, then slightly varies with annealing and is still 20% after annealing at 600 8C. This demonstrates the good thermal stability of the Co/Mo_2C multilayer. We used a simplified two-layer model and modified optical indices of the Co nanofilms to fit the experimental X-ray reflectivity curves. The same modified values of the optical indices are used to fit the X-ray standing-wave curves, confirming the usefulness of the model of the stack.
机译：我们结合了软X射线反射率（SXR）和X射线驻波增强的荧光，研究了Co / Mo_2C纳米多层膜的光学性能和热诱导的界面行为，设计用于接近X射线的软X射线范围。 Co L3吸收边缘。在0.154 nm（CuKα线）和软X射线范围内的两个波长1.59和1.33 nm处（靠近和远离Co L3边缘）进行掠射X射线反射率测量。在荧光实验中，通过驻波法在Co / Mo_2C堆中测量了CoLα发射的强度。我们发现，Co / Mo_2C多层膜在高达600 8C退火温度的软X射线范围内具有良好的光学性能。实际上，对于沉积的样品，在掠角为118的软X射线范围内的反射率值为25％，然后随退火而略有变化，在600 8C退火后仍为20％。这证明了Co / Mo_2C多层膜的良好的热稳定性。我们使用了简化的两层模型，并修改了Co纳米膜的光学指数，以拟合实验X射线反射率曲线。光学指数的相同修改值用于拟合X射线驻波曲线，从而确认了堆栈模型的有用性。

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