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首页> 外文期刊>IEEE Transactions on Education >A low-cost high-performance cleanroom enclosure
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A low-cost high-performance cleanroom enclosure

机译:低成本高性能无尘室外壳

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摘要

A conventional laboratory room was converted into a cleanroom for laser microfabrication. These simple techniques resulted in a measured class 100 environment at the surface of the optical table, well beyond the class 1000 design goal. The total conversion costs were approximately 40% the cost of a comparable commercial modular cleanroom, sufficiently inexpensive for the development of microfabrication instructional laboratories.
机译:将传统的实验室室转换为用于激光微加工的洁净室。这些简单的技术在光学平台的表面产生了一个经过测量的100级环境,远远超出了1000级的设计目标。总的转换成本约为可比的商业模块化洁净室成本的40%,对于开发微制造教学实验室而言足够便宜。

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