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Back-Gate Bias and Substrate Doping Influenced Substrate Effect in UTBB FD-SOI MOS Transistors: Analysis and Optimization Guidelines

机译:UTBB FD-SOI MOS晶体管的背栅偏置和衬底掺杂影响衬底效应:分析和优化指南

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摘要

In this paper, we present physical insights into the role of substrate on the anomalous frequency behavior of small-signal transconductance and output conductance in the ultrathin body and buried oxide fully depleted silicon-on-insulator MOS transistors. Using the simple dc analysis, we attribute this anomalous behavior to the negative feedback originating from both minority and majority carriers in the substrate at different frequency ranges. Through measurements and detailed TCAD simulations, we have shown that back-gate bias and substrate doping strongly modulate the frequency behavior of transconductance and output conductance. It is finally proposed that circuit/device designers can smartly use the back-gate bias and substrate doping to minimize the substrate effect and improve the frequency response of the device intrinsic gain.
机译:在本文中,我们提供了有关衬底在超薄体和埋入式氧化物完全耗尽型绝缘体上MOS晶体管中小信号跨导和输出电导异常频率行为中的作用的物理见解。使用简单的直流分析,我们将此异常行为归因于负反馈,该负反馈源自衬底在不同频率范围内的少数和多数载波。通过测量和详细的TCAD模拟,我们已经表明,背栅偏置和衬底掺杂会强烈地调节跨导和输出电导的频率行为。最终提出,电路/器件设计者可以巧妙地利用背栅偏置和衬底掺杂来最小化衬底效应并改善器件固有增益的频率响应。

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