Infrared focal plane array incorporating silicon IC process compatible bolometer

Tanaka A.; Matsumoto S.

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Infrared focal plane array incorporating silicon IC process compatible bolometer

机译：结合了硅IC工艺兼容测辐射热仪的红外焦平面阵列

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A 128/spl times/128 element bolometer infrared image sensor using thin film titanium is proposed. The device is a monolithically integrated structure with a titanium bolometer detector located over a CMOS circuit that reads out the bolometer's signals. By employing a metallic material like titanium and refining the CMOS readout circuit, it is possible to minimize 1/f noise. It is demonstrated that the use of low 1/f noise material will help increase bias current and improve the S/N ratio. Since the fabrication process is silicon-process compatible, costs can be kept low.

机译：提出了一种采用薄膜钛的128 / spl次/ 128元件测辐射热仪红外图像传感器。该设备是单片集成结构，其钛金属测辐射热计检测器位于CMOS电路上方，该电路可读取测辐射热计的信号。通过采用金属材料（例如钛）并完善CMOS读出电路，可以将1 / f噪声降至最低。事实证明，使用低1 / f噪声材料将有助于增加偏置电流并改善信噪比。由于制造工艺与硅工艺兼容，因此可以保持较低的成本。

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来源
《IEEE Transactions on Electron Devices》 |1996年第11期|P.1844-1850|共7页
作者
Tanaka A.; Matsumoto S.;
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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
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1. Wafer-level membrane transfer bonding of polycrystalline silicon bolometers for use in infrared focal plane arrays [J] . Niklaus F., Stemme G., Kalvesten E. Journal of Micromechanics and Microengineering . 2001,第5期

机译：用于红外焦平面阵列的多晶硅辐射热计的晶圆级膜转移键合
2. A digital output readout circuit with substrate temperature and bias heating compensation for uncooled micro-bolometer infrared focal plane arrays [J] . Que Longcheng, Wei Linhai, Lv Jian, Infrared physics and technology . 2015,第Null期

机译：具有基板温度和偏置加热补偿的数字输出读出电路，用于未冷却的微辐射热计红外焦平面阵列
3. High-performance uncooled amorphous silicon video graphics array and extended graphics array infrared focal plane arrays with 17-μm pixel pitch [J] . Jean-Luc Tissot, Sebastien Tinnes, Alain Durand, Optical engineering . 2011,第6期

机译：具有17μm像素间距的高性能非冷却非晶硅视频图形阵列和扩展图形阵列红外焦平面阵列
4. Silicon IC Process Compatible Bolometer Infrared Focal Plane Array [C] . Tanaka, A., Matsumoto, . 2001

机译：硅IC工艺兼容的Bolometer红外焦平面阵列
5. The fabrication, microstructural characterization, and internal photoresponse of platinum silicide/p-type silicon and iridium silicide/p-type silicon Schottky barrier photodetectors for infrared focal plane arrays [D] . Mercer, Douglas Edward 1990

机译：红外焦平面阵列用硅化铂/ p型硅和硅化铱/ p型硅肖特基势垒光电探测器的制造，微观结构表征和内部光响应
6. Subcellular Biochemical Investigation of PurkinjeNeurons Using Synchrotron Radiation Fourier Transform Infrared SpectroscopicImaging with a Focal Plane Array Detector [O] . Mark J. Hackett, Ferenc Borondics, Devin Brown, 2013

机译：浦肯野的亚细胞生化研究神经元使用同步辐射傅立叶变换红外光谱用焦平面阵列探测器成像
7. Uncooled Mid-wave Infrared Focal Plane Array Using Band Gap Engineered Mercury Cadmium Telluride Quantum Dot Coated Silicon ROIC [O] . Abhijit Chatterjee, Naresh Babu Pendyala, Amardeep Jagtap, 2019

机译：使用带隙工程汞镉碲化镉量子点涂层硅ROIC的带空气隙的红外线焦平面阵列
8. Fabrication, Microstructural Characterization, and Internal Photoresponse ofPlatinum Silicide/P-Type Silicon and Iridium Silicide/P-Type Silicon Schottky Barrier Photodetectors for Infrared Focal Plane Arrays [R] . Mercer, D. E. 1991

机译：用于红外焦平面阵列的铂硅化物/ p型硅和铱硅化物/ p型硅肖特基势垒光电探测器的制造，微观结构表征和内部光响应

Infrared focal plane array incorporating silicon IC process compatible bolometer

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