To suppress dark current of high temperature /spl beta/-SiC/Si optoelectronic devices with porous silicon substrate

Wen-Tse Hsieh; Yean-Kuen Fang

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To suppress dark current of high temperature /spl beta/-SiC/Si optoelectronic devices with porous silicon substrate

机译：抑制具有多孔硅衬底的高温/ spl beta / -SiC / Si光电器件的暗电流

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The suppression of high temperature dark current in a /spl beta/-SiC/Si optoelectronic device with a porous substrate has been studied. A pin structure was used to demonstrate the applicability. Experimental results show a 12-fold improvement in optical gain at 200/spl deg/C operating temperature for the sample prepared on a porous silicon substrate compared to the sample prepared on a Si substrate. The improvement is attributed to the suppression of dark current by the high resistivity and flexibility of the porous substrate.

机译：已经研究了在具有多孔衬底的/ spl beta / -SiC / Si光电子器件中抑制高温暗电流的方法。引脚结构用于证明其适用性。实验结果表明，与在硅衬底上制备的样品相比，在多孔硅衬底上制备的样品在200 / spl deg / C的工作温度下的光学增益提高了12倍。改善归因于多孔基板的高电阻率和柔性来抑制暗电流。

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《Electronics Letters》 |2000年第22期|P.1869-1870|共2页
作者
Wen-Tse Hsieh; Yean-Kuen Fang;
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正文语种 eng
中图分类无线电电子学、电信技术;
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1. Improvement of /spl beta/-SiC/Si pn diode high temperature characteristics with porous silicon layer [J] . Wen-Tse Hsieh, Yean-Kuen Fang Electronics Letters . 2000,第1期

机译：多孔硅层改善/ spl beta / -SiC / Si pn二极管的高温特性
2. Current improvement of porous silicon photovoltaic devices by using double layer porous silicon structure: applicable in porous silicon solar cells [J] . M. Rajabi, R. S. Dariani Journal of porous materials . 2009,第5期

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3. 3C-SiC Hetero-Epitaxially Grown on Silicon Compliance Substrates and New 3C-SiC Substrates for Sustainable Wide-Band-Gap Power Devices (CHALLENGE) [J] . Francesco La Via, Fabrizio Roccaforte, Antonino La Magna, Materials science forum . 2018,第期

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4. A high temperature pressure sensor with /spl beta/-SiC piezoresistors on SOI substrates [C] . Ziermann, R., von Berg, . 1997

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To suppress dark current of high temperature /spl beta/-SiC/Si optoelectronic devices with porous silicon substrate

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