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Fractal and harmonic analysis of surface roughness profile induced by ion beam irradiation

机译:离子束辐照引起的表面粗糙度轮廓的分形和谐波分析

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摘要

The paper presents fractal as well as harmonic analysis of metal surface roughness profiles induced by 800 eV argon broad ion beam. Changes of roughness parameter R_a together with microscopic observation of surface topography modification were used to verify the fractal and harmonic analysis results and to give relatively full picture of the surface morphological modification.
机译:本文介绍了由800 eV氩宽离子束引起的金属表面粗糙度轮廓的分形和谐波分析。使用粗糙度参数R_a的变化以及表面形貌修饰的显微镜观察来验证分形和谐波分析结果,并提供相对完整的表面形貌修饰图。

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