The GD source of neutralized ion beam as a tool of surface nanomodification

Janusz WILK; Zbigniew W. KOWALSKI

首页> 外文期刊>Przeglad Elektrotechniczny >The GD source of neutralized ion beam as a tool of surface nanomodification

【24h】

The GD source of neutralized ion beam as a tool of surface nanomodification

机译：中和离子束的GD源作为表面纳米改性的工具

获取原文

获取原文并翻译 | 示例

掌桥外文数据库（机构版） >>

开具论文收录证明 >>

文献代查 >>

页面导航

摘要
著录项
相似文献
相关主题

摘要

The paper presents a simple and convenient source of neutralized ion beam as well as its use to surface nanomodification. Surface polishing, surface roughening, generation of surface and subsurface structure elements (waves, ripples) are discussed. All those events are especially crucial in such processes like ion-beam thinning of samples for TEM, sputter depth profiling, generation of patterns in sub-100 nm regime for microanoelectronics.

机译：本文提出了一种简单而方便的中和离子束源及其在表面纳米改性中的用途。讨论了表面抛光，表面粗糙化，表面和地下结构元素（波浪，波纹）的生成。所有这些事件在诸如TEM样品的离子束变薄，溅射深度分析，用于微/纳米电子学的低于100 nm的图形生成等过程中都至关重要。

著录项

来源
《Przeglad Elektrotechniczny》 |2008年第3期|p.36-38|共3页
作者
Janusz WILK; Zbigniew W. KOWALSKI;
展开▼
作者单位

展开▼
收录信息
原文格式 PDF
正文语种 eng
中图分类电工技术;
关键词

相似文献

外文文献
中文文献
专利

1. Effect of surface roughness of the neutralization grid on the energy and flux of fast neutrals and residual ions extracted from a neutral beam source [J] . Alok Ranjan, Clemens Helmbrecht, Vincent M. Donnelly, Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures . 2007,第1期

机译：中和栅格的表面粗糙度对从中性束源提取的快速中性粒子和残留离子的能量和通量的影响
2. Mathematical Simulation of an Inclined Neutralization Channel for a Plasma Source of Neutral Beams [J] . A. V. Degtyarev, V. P. Kudrya, Yu. P. Maishev Russian Microelectronics . 2009,第3期

机译：中性束等离子体源倾斜中和通道的数学模拟
3. Neutralization of an Ion Beam from the End-Hall Ion Source by a Plasma Electron Source Based on a Discharge in Crossed E x H Fields [J] . Dostanko AP, Golosov DA Technical physics . 2009,第10期

机译：基于交叉E x H场中的放电，通过等离子体电子源对来自霍尔离子源的离子束的中和
4. Advanced Studies of Medium-mass Ion Sources- 1: Effect of Beam Neutralization on Beam Micro-divergence Angle [C] . Koichi Kasuya, Seimei Araya, Takahiro Kamiya 14th International Conference on High-Power Particle Beams Jun 23-28, 2002 Albuquerque, New Mexico . 2002

机译：中等质量离子源的高级研究-1：束中和对束微发散角的影响
5. Ultrafine-Grained Surface Layers on S7 Tool Steel via Electron Beam Irradiation and Cryogenic Freezing [D] . College, David Alan. 2018

机译：S7工具钢上的超细粒化表面层通过电子束照射和低温冷冻
6. Detection of Correlated Sources in EEG using Combination of Beamforming and Surface Laplacian Methods [O] . Vyacheslav Murzin, Armin Fuchs, J.A. Scott Kelso -1

机译：结合波束形成和表面拉普拉斯方法检测脑电图中的相关源
7. Ion accumulation and space charge neutralization in intensive electron beams for ion sources and electron cooling [O] . Shirkov, G D 1996

机译：用于离子源和电子冷却的强电子束中的离子积累和空间电荷中和
8. Ion accumulation and space charge neutralization in intensive electron beams for ion sources and electron cooling [R] . Shirkov, G. D. 1996

机译：用于离子源和电子冷却的强电子束中的离子累积和空间电荷中和

The GD source of neutralized ion beam as a tool of surface nanomodification

摘要

著录项

相似文献

相关主题

期刊订阅