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Optimal design of advanced distillation configuration for enhanced energy efficiency of waste solvent recovery process in semiconductor industry

机译：先进蒸馏配置的优化设计，可提高半导体行业废溶剂回收工艺的能效

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摘要

The semiconductor industry is one of the largest industries in the world. On the other hand, the huge amount of solvent used in the industry results in high production cost and potential environmental damage because most of the valuable chemicals discharged from the process are incinerated at high temperatures. A distillation process is used to recover waste solvent, reduce the production-related costs and protect the environment from the semiconductor industrial waste. Therefore, in this study, a distillation process was used to recover the valuable chemicals from semiconductor industry discharge, which otherwise would have been lost to the environment. The conventional sequence of distillation columns, which was optimized using the Box and sequential quadratic programming method for minimum energy objectives, was used. The energy demands of a distillation problem may have a substantial influence on the profitability of a process. A thermally coupled distillation and heat pump-assisted distillation sequence was implemented to further improve the distillation performance. Finally, a comparison was made between the conventional and advanced distillation sequences, and the optimal conditions for enhancing recovery were determined. The proposed advanced distillation configuration achieved a significant energy saving of 40.5% compared to the conventional column sequence. (c) 2015 Elsevier Ltd. All rights reserved.
机译：半导体产业是世界上最大的产业之一。另一方面，工业中使用的大量溶剂导致高生产成本和潜在的环境破坏，因为从该过程中排出的大多数有价值的化学物质都是在高温下焚化的。蒸馏过程用于回收废溶剂，降低与生产有关的成本，并保护环境免受半导体工业废料的侵害。因此，在这项研究中，采用蒸馏工艺从半导体工业排放物中回收了有价值的化学物质，否则这些化学物质会损失到环境中。使用了常规的蒸馏塔序列，该序列使用Box和顺序二次编程方法进行了优化，以实现最低能量目标。蒸馏问题的能源需求可能会对过程的盈利能力产生重大影响。实施热耦合蒸馏和热泵辅助蒸馏程序以进一步提高蒸馏性能。最后，对常规蒸馏步骤和高级蒸馏顺序进行了比较，并确定了提高回收率的最佳条件。与常规塔序列相比，建议的高级蒸馏配置可显着节省40.5％的能源。 （c）2015 Elsevier Ltd.保留所有权利。

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