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首页> 外文期刊>Environmental engineering and management journal >RECOVERY OF SILICON, COPPER AND ALUMINUM FROM SCRAP SILICON WAFERS BY LEACHING AND PRECIPITATION
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RECOVERY OF SILICON, COPPER AND ALUMINUM FROM SCRAP SILICON WAFERS BY LEACHING AND PRECIPITATION

机译：浸出和沉淀从废硅片中回收硅，铜和铝

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The Silicon wafer plays an important role in modern electronic products. During the production of Silicon wafer, a large amount of scrap Silicon wafer is generated. The necessity for it to be recycled and recovered is of vast importance since the metal Silicon (Si) is the major by product. Besides Silicon, the wafers also contain a small quantity of Copper (Cu) and Aluminum (Al), that are considered as minor elements during the recovery process of the Silicon wafer production. Therefore, in order to conserve limited natural resources, minimize pollution problems and recover the valuable resource of Silicon from scrap wafer, a leaching method was adopted in this study. Physical and chemical methods such as screening and leaching processes were employed to investigate the recovery of Silicon and other metals from scrap wafers. The leaching process was carried out with three leaching reagents such as HCl, HNO3 and H2SO4. Batch studies were also conducted to optimize the leaching operating conditions with consideration to the leaching time, the concentration of leaching reagent, temperature and solid/liquid ratio. The result of the leaching tests revealed that the Copper and Aluminum contained in the scrap wafers can be 100% leached and removed by using 5N HNO3 under the conditions of two hours leaching time, 5g/50 mL of solid/liquid ratio, and 70 degrees C temperatures. After leaching with Nitric acid, a high purity of Silicon was obtained and could be reused as the feed material for the production of Silicon wafer. The Copper and Aluminum remaining in the leaching solution was recovered through precipitation by adjusting its' pH to 11 and 7 to form Cu (OH)(2) and Al(OH)(3), respectively.
机译：硅晶片在现代电子产品中起着重要作用。在硅晶片的生产过程中，会产生大量的废硅晶片。由于金属硅（Si）是主要的副产品，因此必须对其进行回收和再利用至关重要。除了硅之外，晶圆还包含少量的铜（Cu）和铝（Al），它们在硅晶圆生产的回收过程中被视为次要元素。因此，为了节约有限的自然资源，减少污染问题并从废晶圆中回收硅的宝贵资源，本研究采用浸出法。物理和化学方法（例如筛选和浸出工艺）用于研究从废晶圆中回收硅和其他金属的方法。用三种浸出试剂如HCl，HNO3和H2SO4进行浸出过程。考虑到浸出时间，浸出试剂的浓度，温度和固/液比，还进行了分批研究以优化浸出操作条件。浸出试验的结果表明，在2小时浸出时间，5g / 50 mL固/液比和70度的条件下，使用5N HNO3可以100％浸出和去除废晶片中所含的铜和铝。温度。用硝酸浸出后，获得了高纯度的硅，可以将其重新用作生产硅片的原料。通过将其pH值调节至11和7，通过沉淀法回收浸出溶液中残留的铜和铝，分别形成Cu（OH）（2）和Al（OH）（3）。

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