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Study of Deep-etched Glass Waveguide Grating

机译：深蚀刻玻璃波导光栅的研究

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Photoresist grating was fabricated by holography, and it was used in the mask of ion etching. The groovy depth of the etched glass grating was 1.6 μm. The glass waveguide was formed by K~+/Na~+ ion exchanging. The laser beam of 633nm was coupled in the waveguide by a prism at one end, then,it passed through the grating and came out of the waveguide at other end. In the experiment, the Bragg diffraction with several orders was observed. The first order Bragg diffraction had the highest efficiency of 90 percent.
机译：用全息照相术制造光致抗蚀剂光栅，并将其用于离子蚀刻的掩模中。蚀刻玻璃光栅的沟槽深度为1.6μm。玻璃波导是通过K〜+ / Na〜+离子交换形成的。 633nm的激光束的一端通过棱镜耦合到波导中，然后穿过光栅并从另一端出来。在实验中，观察到了数个级数的布拉格衍射。一阶布拉格衍射的最高效率为90％。

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