The Zero-gap Directional Coupler Integrated on SOI for 1.3μm Operation

Zhao Cezhou; Li Guozheng; Liu Enke; Liu Xiding; Gao Yong

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The Zero-gap Directional Coupler Integrated on SOI for 1.3μm Operation

机译：集成在SOI上的零间隙定向耦合器，用于1.3μm工作

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摘要

SOI zero-gap directional couplers are studied by using large cross-section single-mode rib waveguide theory and dual-mode interference principle in silicon direct bonding SOI by back-polishing. And they are fabricated by using KOH anistropic etching. The insertion loss is measured to 4.81 dB, and the crosstalk is below -18.6 dB at a wavelength of 1.3μm.

机译：利用大截面单模肋波导理论和双模干涉原理研究了SOI零间隙定向耦合器在通过背抛光进行的硅直接键合SOI中的应用。并且它们是通过使用KOH各向异性蚀刻制成的。测量的插入损耗为4.81 dB，在1.3μm的波长下串扰低于-18.6 dB。

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来源
《High Technology Letters》 |1995年第2期|p.51-52|共2页
作者
Zhao Cezhou; Li Guozheng; Liu Enke; Liu Xiding; Gao Yong;
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作者单位

Department of Electronic Engineering, Xi'an Jiaotong University, Xi'an 710049, P. R. China;

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原文格式 PDF
正文语种 eng
中图分类工业技术;自然科学总论;
关键词
SOI; integrated optics; directional couplers; anisotropic etching;

机译：SOI;集成光学;定向耦合器;各向异性刻蚀;

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专利

1. The Zero-gap Directional Coupler Integrated on SOI for 1.3μm Operation [J] . 赵策洲高技术通讯：英文版 . 1995,第002期

机译：在SOI上集成的零间形定向耦合器1.3μm操作
2. A 1.3-/spl mu/m wavelength laser with an integrated output power monitor using a directional coupler optical power tap [J] . Koren U., Miller B.I. IEEE Photonics Technology Letters . 1996,第3期

机译：具有定向输出光功率抽头的集成输出功率监控器的1.3- / splμ/ m波长激光器
3. Analysis of Ti:LiNbO_(3) zero-gap directional coupler for wavelength division multiplexer/demultiplexer [J] . Pranabendu Ganguly, Juran Chandra Biswas, Samir Kumar Lahiri Optics Communications: A Journal Devoted to the Rapid Publication of Short Contributions in the Field of Optics and Interaction of Light with Matter . 2008,第12期

机译：用于波分复用器/解复用器的Ti：LiNbO_（3）零间隙定向耦合器的分析
4. Practical considerations for fabrication of active AlxGa1-xAs zero-gap directional couplers [C] . James G. Grote, Air Force Wright Lab., Wright-Patterson AFB, . 1995

机译：有源AlxGa1-xAs零间隙定向耦合器制造的实际考虑
5. TOPICS IN GUIDED-WAVE OPTICS: SINGLE-WAVELENGTH ETCHED-COUPLED-CAVITY INDIUM-GALLIUM - ARSENIDE PHOSPHORUS/INDIUM PHOSPHORUS SEMICONDUCTOR LASERS EMITTING AT 1.3 MICRONS, HIGH POWER SEMICONDUCTOR LASER ARRAYS AND CROSS-TALK PROBLEMS IN OPTICAL DIRECTIONAL COUPLERS. [D] . CHEN, KUO-LIANG. 1985

机译：导波光学中的主题：单波长蚀刻耦合腔铟镓-砷磷/铟磷半导体激光器的发射功率为1.3微米，大功率半导体激光阵列的发射率和入射角为三角形。
6. Rigorous Approach for Design of Differential Coupled-Line Directional Couplers Applicable in Integrated Circuits and Substrate-Embedded Networks [O] . Kamil Staszek, Krzysztof Wincza, Slawomir Gruszczynski -1

机译：设计适用于集成电路和衬底嵌入式网络的差分耦合线定向耦合器的严格方法
7. Directional earth fault relay operation in mutually coupled multiple circuit distribution lines [O] . Perera Lasantha B. 2010

机译：相互耦合的多回路配电线路中的定向接地故障继电器操作
8. Accuracy of Directional Coupler Theory in Fiber or Integrated Optics Applications. [R] . Yeh, C., Manshadi, F., Casey, K. F., 1978

机译：光纤或集成光学应用中定向耦合器理论的精度。

The Zero-gap Directional Coupler Integrated on SOI for 1.3μm Operation

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