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首页> 外文期刊>IEEE journal of selected topics in quantum electronics >Self-alignment of optical fibers with optical quality end-polished silicon rib waveguides using wet chemical micromachining techniques
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Self-alignment of optical fibers with optical quality end-polished silicon rib waveguides using wet chemical micromachining techniques

机译：使用湿化学微加工技术对具有光学质量的末端抛光硅肋波导的光纤进行自对准

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摘要

This paper presents a new cost-effective method for self-aligning optical fibers on silicon platforms and for achieving optical quality end-polished silicon-on-insulator (SOI) rib waveguide devices using wet chemical micromachining techniques. Through accurate alignment to the [011] plane of the [100] device layer of a SOI wafer, rib waveguide devices with self-alignment features are fabricated with the ends of each waveguide wet etched and concurrently polished providing an optical quality facet or fiber-to-waveguide interface. Eliminating the need to saw cut and then mechanically polish the ends of fabricated devices, the overall fabrication process is simplified whilst also providing an integrated optic fiber alignment capability at the ends of the fabricated waveguide devices with an alignment accuracy limited by fiber size tolerance. Experimental measurements were carried out to verify the optical quality of the waveguide facets formed using this new technique which proved excess facet losses of practically unmeasurable quantities.
机译：本文提出了一种新的经济有效的方法，用于在硅平台上自对准光纤，并使用湿化学微加工技术来实现光学质量的末端抛光绝缘体上硅（SOI）肋波导器件。通过精确对准SOI晶片[100]器件层的[011]平面，可以制造出具有自对准特征的肋形波导器件，对每个波导的端部进行湿法蚀刻并同时抛光，从而提供光学质量的刻面或光纤。波导接口。消除了锯切然后机械抛光制成装置的端部的需要，简化了整个制造过程，同时在制成的波导装置的端部处提供了集成的光纤对准能力，其对准精度受到纤维尺寸公差的限制。进行实验测量以验证使用该新技术形成的波导小平面的光学质量，该事实证明了实际上无法测量的过量小平面损耗。

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