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首页> 外文期刊>IEEE journal of selected topics in quantum electronics >Self-alignment of optical fibers with optical quality end-polishedsilicon rib waveguides using wet chemical micromachining techniques
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Self-alignment of optical fibers with optical quality end-polishedsilicon rib waveguides using wet chemical micromachining techniques

机译：使用湿化学微加工技术对具有光学质量的末端抛光硅肋形波导的光纤进行自对准

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摘要

This paper presents a new cost-effective method for self-aligningnoptical fibers on silicon platforms and for achieving optical qualitynend-polished silicon-on-insulator (SOI) rib waveguide devices using wetnchemical micromachining techniques. Through accurate alignment to then(011) plane of the (100) device layer of a SOI wafer, rib waveguidendevices with self-alignment features are fabricated with the ends ofneach waveguide wet etched and concurrently polished providing an opticalnquality facet or fiber-to-waveguide interface. Eliminating the need tonsaw cut and then mechanically polish the ends of fabricated devices, thenoverall fabrication process is simplified whilst also providing annintegrated optic fiber alignment capability at the ends of thenfabricated waveguide devices with an alignment accuracy limited by fibernsize tolerance. Experimental measurements were carried out to verify thenoptical quality of the waveguide facets formed using this new techniquenwhich proved excess facet losses of practically unmeasurable quantities
机译：本文提出了一种新的经济有效的方法，用于在硅平台上自对准正向光纤，并通过湿化学微加工技术来实现光学质量的抛光绝缘子上硅（SOI）肋波导器件。通过精确对准SOI晶片的（100）器件层的（011）平面，可以制造出具有自对准特征的肋形波导器件，其中每个波导的端部都经过湿法蚀刻和抛光，从而提供了光学质量良好的刻面或光纤到波导接口。消除了需要进行扁锯切割，然后机械抛光制成装置的端部的需要，从而简化了整个制造过程，同时还在制成的波导装置的端部提供了集成的光纤对准能力，其对准精度受到光纤尺寸公差的限制。进行了实验测量，以验证使用这种新技术形成的波导小平面的光学质量，这证明了实际上无法测量的过量小平面损耗

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