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An Above IC MEMS RF Switch

机译:上面的IC MEMS RF开关

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摘要

Addressing reconfiguration of radio frequency (RF) systems might require high performance integrated RF switching capabilities. In this regard, a particular design experience of an integrated circuit (IC) monolithically integrated microelectromechanical systems (MEMS) ohmic switch is reported here. Applications at 2 GHz have been targeted. The MEMS device was processed on top of a 0.25-μm standard BiCMOS wafer including the switch IC driver. An extensive RF characterization has been made. The switch exhibits at 2 GHz a 0.18-dB insertion loss and a 57-dB isolation level. This realization opens the way to further designs of reconfigurable architectures for multiband and multistandard mobile terminals.
机译:解决射频(RF)系统的重新配置可能需要高性能的集成RF交换功能。在这方面,这里报道了集成电路(IC)单片集成微机电系统(MEMS)欧姆开关的特定设计经验。目标是2 GHz的应用。在包括开关IC驱动器的0.25μm标准BiCMOS晶圆上对MEMS器件进行了处理。已经进行了广泛的RF表征。该开关在2 GHz时具有0.18 dB的插入损耗和57 dB的隔离度。该实现为进一步设计用于多频带和多标准移动终端的可重新配置架构开辟了道路。

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