Silicon micromachined waveguides for millimeter-wave and submillimeter-wave frequencies

McGrath W.R.; Walker C.

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Silicon micromachined waveguides for millimeter-wave and submillimeter-wave frequencies

机译：硅微加工波导，用于毫米波和亚毫米波频率

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The development of micromachining techniques to create silicon-based waveguide circuits, which can operate up to high submillimeter-wave frequencies, is reported. As a first step, a WR-10 waveguide has been fabricated from

机译：据报道，微加工技术的发展可产生硅基波导电路，该电路可在高达亚毫米波的频率下工作。第一步，WR-10波导由以下材料制成

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来源
《IEEE Microwave and Guided Wave Letters》 |1993年第3期|P.61-63|共3页
作者
McGrath W.R.; Walker C.;
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正文语种 eng
中图分类无线电电子学、电信技术;
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1. Millimeter-Wave Substrate Integrated Waveguide Using Micromachined Tungsten-Coated Through Glass Silicon Via Structures [J] . Ik-Jae Hyeon, Chang-Wook Baek Micromachines . 2018,第4期

机译：使用微加工钨涂层玻璃硅通孔结构的毫米波基片集成波导
2. Air-Filled Long Slot Leaky-Wave Antenna Based on Folded Half-Mode Waveguide Using Silicon Bulk Micromachining Technology for Millimeter-Wave Band [J] . Le Chang, Zhijun Zhang, Yue Li, Antennas and Propagation, IEEE Transactions on . 2017,第7期

机译：基于折叠半模波导的充气长缝漏波天线，采用硅体微加工技术，用于毫米波频段
3. A millimeter-wave bandpass waveguide filter using a width-stacked silicon bulk micromachining approach [J] . Stickel M., Kremer P., Eleftheriades G.V. IEEE microwave and wireless components letters . 2006,第4期

机译：使用宽度堆叠硅体微加工方法的毫米波带通波导滤波器
4. Medium-range propagation flexible waveguides at millimeter-wave and submillimeter-wave frequencies [C] . Alonso-delPino M., Llombart N., Spirito M. International Conference on Infrared, Millimeter, and Terahertz Waves . 2015

机译：毫米波和亚毫米波频率的中程传播柔性波导
5. SU-8 Micromachining of Millimeter and Submillimeter-wave Waveguide Circuits. [D] . Smith, Charlie H. 2010

机译：SU-8毫米波和亚毫米波波导电路的微加工。
6. Millimeter-Wave Substrate Integrated Waveguide Using Micromachined Tungsten-Coated Through Glass Silicon Via Structures [O] . Ik-Jae Hyeon, Chang-Wook Baek 2018

机译：使用微加工钨涂层玻璃硅通孔结构的毫米波基片集成波导
7. Silicon micromachined waveguides for millimeter-wave and submillimeter-wave frequencies [O] . McGrath William R., Walker Christopher, Yap Markus, 1993

机译：硅微加工波导，用于毫米波和亚毫米波频率

Silicon micromachined waveguides for millimeter-wave and submillimeter-wave frequencies

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