The development of micromachining techniques to create silicon-based waveguide circuits, which can operate up to high submillimeter-wave frequencies, is reported. As a first step, a WR-10 waveguide has been fabricated from (110) silicon wafers. Insertion loss measurements on a gold-plated silicon waveguide show performance comparable to that of standard metal waveguides. It is suggested that active devices and planar circuits can be integrated with the waveguides, solving the traditional mounting problems.
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