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首页> 外文期刊>IEEE Photonics Technology Letters >Highly Scalable 2-D Fiber Collimator Array Based on an Array of Through-Holes in Silicon
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Highly Scalable 2-D Fiber Collimator Array Based on an Array of Through-Holes in Silicon

机译：基于硅通孔阵列的高度可扩展的二维光纤准直器阵列

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摘要

A highly scalable 4×4 fiber collimator array with long collimation length has been fabricated by utilizing a two-dimensional array of precision-controlled through-holes in silicon. A fiber array and a lens array were prepared by precisely positioning corresponding fibers and lenses utilizing the holes in separate silicon substrates, and the two arrays were integrated to implement the collimator array. The achieved average angular pointing accuracy and positioning accuracy of the collimator array were about 0.1° and better than 2 μm, respectively. At a distance of 10 cm from the collimator, the measured collimated beam size was 400 μm with its full divergence angle of 0.18°.
机译：通过利用硅中精确控制的通孔的二维阵列，已经制造了具有长准直长度的高度可扩展的4×4光纤准直器阵列。通过利用在分开的硅基板中的孔精确定位相应的光纤和透镜来制备光纤阵列和透镜阵列，并且将两个阵列集成以实现准直仪阵列。准直仪阵列的平均角指向精度和定位精度分别约为0.1°和2μm。在距准直仪10 cm的距离处，测得的准直光束尺寸为400μm，全发散角为0.18°。

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