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The Bond Strength of Au/Si Eutectic Bonding Studied by IR Microscope

机译：红外显微镜研究Au / Si共晶键合强度

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The interface of Au/Si(100) eutectic bonding was investigated by infrared (IR) microscope and related to the bond strength. A strong relationship between the IR images and the bond strengths was found. Bond strength test showed that a strong bond has many square black spots in the IR images, whereas a poor bond has fewer or no square black spots. In order to study the nature of the relationship, the dissolution behavior of the bare Si(100) surface after bonding was investigated. During the Au/Si(100) eutectic reaction, the dissolution of the bare Si(100) surface primarily occurs by the formation of the craters which result in many square black spots in the IR images. The formation of the craters is ascribed to the anisotropic nature of Au/Si reaction that results in three-dimensional dissolution behavior on the bare Si(100) side. In order to further test the anisotropy hypothesis, Au/Si(111) bonding was also studied. Under the same bonding conditions, triangular black spots were observed in the IR images and triangular pits were found on the bare Si(111) surface. The analysis suggests that the craters on the bare Si(100) surface, in other words the square black spots in the IR images, are the indication of Au/Si(100) eutectic reaction. More craters mean a reaction between Au and Si(100), which occurs uniformly at the Au/Si(100) bonding interface compared to the case of fewer craters. No crater indicates that there is no eutectic reaction in the region. Therefore, the IR microscope may be used to evaluate and compare the different bond strengths qualitatively.
机译：通过红外（IR）显微镜研究了Au / Si（100）共晶键合界面，并与键合强度有关。发现红外图像和粘结强度之间有很强的关系。粘结强度测试表明，牢固的粘结在红外图像中有许多正方形的黑点，而粘结性较差的正方形的黑点很少或没有。为了研究这种关系的性质，研究了键合后裸露的Si（100）表面的溶解行为。在Au / Si（100）共晶反应过程中，裸露的Si（100）表面的溶解主要是通过形成陨石坑而发生的，该陨石坑会在IR图像中导致许多方形黑点。凹坑的形成归因于Au / Si反应的各向异性，导致在裸露的Si（100）侧发生三维溶解行为。为了进一步检验各向异性假设，还研究了Au / Si（111）键。在相同的键合条件下，在红外图像中观察到三角形的黑点，在裸露的Si（111）表面上发现了三角形的凹坑。分析表明，裸露的Si（100）表面上的凹坑，换句话说，红外图像中的方形黑点是Au / Si（100）共晶反应的指示。凹坑越多意味着与凹坑较少的情况相比，Au和Si（100）之间的反应在Au / Si（100）键合界面处均匀发生。没有火山口表明该区域没有共晶反应。因此，红外显微镜可用于定性评估和比较不同的粘结强度。

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