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Burn-in effect on yield

机译：老化对成品率的影响

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By removing infant mortalities, burn-in of semiconductor devices improves reliability. However, burn-in may affect the yield of semiconductor devices since defects grow during burn-in and some of them end up with yield loss. The amount of yield loss depends upon burn-in environments. Another burn-in effect is the yield gain. Since yield is a function of defect density, if some defects are detected and removed during burn-in, the yield of the post-burn-in process can be expected to increase. The amount of yield gain depends upon the number of defects removed during burn-in. In this paper we present yield loss and gain expressions and relate them with the reliability projection of semiconductor devices in order to determine burn-in time.
机译：通过消除婴儿死亡率，半导体器件的预烧提高了可靠性。但是，由于在老化期间缺陷会增加，并且其中一些最终会导致良率损失，因此老化会影响半导体器件的良率。产量损失的数量取决于老化的环境。另一个老化效应是产量增加。由于成品率是缺陷密度的函数，因此，如果在老化过程中检测到一些缺陷并消除了某些缺陷，则可以预期增加老化后工艺的产量。成品率的提高取决于老化过程中去除的缺陷数量。在本文中，我们提出了良率损失和增益表达式，并将它们与半导体器件的可靠性预测联系起来，以确定老化时间。

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