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首页> 外文期刊>Magnetics, IEEE Transactions on >High Bandwidth Control Design and Implementation for a Dual-Stage Actuation System With a Microthermal Actuator
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High Bandwidth Control Design and Implementation for a Dual-Stage Actuation System With a Microthermal Actuator

机译:具有微热执行器的双阶段执行系统的高带宽控制设计和实现

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摘要

This paper is devoted to the control design and implementation of the dual-stage actuation system with a newly developed microthermal actuator (MTA) as the secondary actuator. The characterization and modeling of this new MTA is presented for controller design. Its performances such as stroke, time constant, and a good linearity are exhibited. The controller design of the MTA-based dual-stage actuation system is then proposed, and aims to push the bandwidth with the MTA. The simulation and the experimental testing have demonstrated the achievable 6-kHz bandwidth with 60-kHz sampling rate, the MTA displacement of 15 nm at 4 kHz, and 0.1-ms seeking time for 40-nm seeking length.
机译:本文致力于以新开发的微热执行器(MTA)作为辅助执行器的双级执行器系统的控制设计和实现。提出了用于控制器设计的新型MTA的特性和建模。表现出其性能,例如行程,时间常数和良好的线性度。然后提出了基于MTA的双级致动系统的控制器设计,旨在通过MTA推动带宽。仿真和实验测试表明,可以实现60 kHz采样率的6 kHz带宽,4 kHz处15 nm的MTA位移和40 nm寻道长度的0.1 ms寻道时间。

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