...
首页> 外文期刊>IEEE Transactions on Magnetics >Effect of Plasma Oxidation on Pre-Oxidized Magnetic Tunnel Junctions
【24h】

Effect of Plasma Oxidation on Pre-Oxidized Magnetic Tunnel Junctions

机译:等离子体氧化对预氧化磁隧道结的影响

获取原文
获取原文并翻译 | 示例
           

摘要

The technique of pre-oxidation of the bottom CoFe electrode prior to deposition of Al$_{2}$ O$_{3}$ was previously shown to be capable of suppressing intermixing at the ferromagnet/Al interface and removing partial shorts near Al grain boundaries. In this paper, we studied the influence of the plasma oxidation on the pre-oxidized magnetic tunnel junctions (MTJs). In general, the tunneling magnetoresistance (TMR) is independent of the plasma oxidation time whereas the resistance-area product (RA) increases with it. However, for the pre-oxidized MTJs with very thin Al$_{2}$O$_{3}$ (Al thickness $≪ $ 0.7 nm prior to plasma oxidation), the TMR decreases with plasma oxidation while the RA increases with it.
机译:先前显示在沉积Al $ _ {2} $ O $ _ {3} $之前对底部CoFe电极进行预氧化的技术能够抑制铁磁体/ Al界面的混合并消除Al附近的部分短路晶界。在本文中,我们研究了等离子体氧化对预氧化的磁性隧道结(MTJ)的影响。通常,隧道磁阻(TMR)与等离子体氧化时间无关,而电阻面积积(RA)随其增加。但是,对于具有非常薄的Al $ _ {2} $ O $ _ {3} $(等离子氧化前的Al厚度$≪ $ 0.7 nm)的预氧化MTJ,TMR随等离子氧化而降低,而RA随它。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号