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首页> 外文期刊>IEEE transactions on nanotechnology >Fabrication of Ultrathin Silicon Nanoporous Membranes and Their Application in Filtering Industrially Important Biomolecules
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Fabrication of Ultrathin Silicon Nanoporous Membranes and Their Application in Filtering Industrially Important Biomolecules

机译：超薄硅纳米多孔膜的制备及其在工业重要生物分子过滤中的应用

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摘要

Ultrathin silicon nanoporous membranes with multiple pores were fabricated using batch processes involving chemical vapor deposition and rapid thermal annealing. Transmission electron microscope images showed the existence of nanopores with an average pore size of 13 nm. Measurement of ionic conduction of electrolytes with varying conductivity across the membranes confirmed the existence of pores and the repeatability of the process. The functional diameter of the pores was determined by analyzing the permeability of several industrially and medically important globular biomolecules of varying sizes such as α-amylase, bovine serum albumin, catalase and xanthine oxidase. Biomolecules with hydrodynamic diameters up to 8 nm passed through the nanopores, whereas the passage of the larger molecules was hindered. The surface charges on the molecules determine the functional diameter of the pores, and hence the permeability, as substantiated by varying the pH of the buffer solution. The filtered proteins were found to be uncleaved from sodium dodecyl sulfate polyacrylamide gel electrophoresis, and the enzyme assay of the filtered amylase showed that the activity remained unchanged.
机译：使用涉及化学气相沉积和快速热退火的分批工艺制备了具有多个孔的超薄硅纳米多孔膜。透射电子显微镜图像显示存在平均孔径为13 nm的纳米孔。通过改变跨膜电导率来测量电解质的离子传导性，证实了孔的存在和过程的可重复性。通过分析几种工业和医学上重要的大小不同的球形生物分子（例如α-淀粉酶，牛血清白蛋白，过氧化氢酶和黄嘌呤氧化酶）的渗透性来确定孔的功能直径。流体动力学直径最大为8 nm的生物分子穿过纳米孔，而较大分子的通过受到阻碍。分子上的表面电荷决定了孔的功能直径，并因此决定了通透性，正如通过改变缓冲溶液的pH值所证实的那样。发现过滤的蛋白质未从十二烷基硫酸钠聚丙烯酰胺凝胶电泳中切割，并且对过滤的淀粉酶的酶分析显示活性保持不变。

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