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首页> 外文期刊>IEEE transactions on nanotechnology >Dependences of Sputtering Times on the Structural and Electrical Properties of ZnO/Ag/ZnO Thin Films on PET by DC Sputtering
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Dependences of Sputtering Times on the Structural and Electrical Properties of ZnO/Ag/ZnO Thin Films on PET by DC Sputtering

机译：溅射时间对PET溅射ZnO / Ag / ZnO薄膜结构和电学性能的影响

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摘要

Transparent conductive oxide thin films are utilized as transparent electrode materials used in various displays due to its high conductivity and penetration ratio in a visible ray of spectrum. Indium zinc oxide (ITO) is one of the most widely used transparent conductive oxide films. However, recently replaceable resources have become imperative due to the increased price of indium used as the raw material. Zinc oxide (ZnO) has drawn attention as an alternative material for ITO due to its low cost, abundance, and eco-friendly characteristics. Much of the research work has been conducted because of its advantages. Meanwhile, due to the appearance of flexible thin film, researchers’ attention to investigate the thin films on polyethylene terephthalate (PET) is continuously increasing. We studied the structural and electrical properties of ZnO/Ag/ZnO films which were deposited onto PET substrate at room temperature with the inclined opposite target type dc magnetron sputtering equipment. The ZnO/Ag/ZnO multilayer films having high transmittance of 78.3% and low sheet resistance of 1.974 Ω/sq are successfully fabricated and can be reproduced by controlling the preparation process parameters properly.
机译：透明导电氧化物薄膜由于其高导电性和在可见光谱中的穿透率而被用作各种显示器中的透明电极材料。氧化铟锌（ITO）是使用最广泛的透明导电氧化物膜之一。但是，由于用作原料的铟价格上涨，近来可替代的资源变得势在必行。氧化锌（ZnO）由于其低成本，丰度和环保特性而作为ITO的替代材料引起了人们的关注。由于其优势，已经进行了许多研究工作。同时，由于柔性薄膜的出现，研究人员对研究聚对苯二甲酸乙二醇酯（PET）上的薄膜的关注日益增加。我们研究了在室温下使用倾斜的对置靶型直流磁控溅射设备将ZnO / Ag / ZnO薄膜沉积在PET基板上的结构和电学性能。成功地制备了具有78.3％的高透射率和1.974Ω/ sq的低薄层电阻的ZnO / Ag / ZnO多层薄膜，并且可以通过适当地控制制备工艺参数来进行复制。

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