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Periodically structured glancing angle deposition thin films

机译：周期性结构化的掠角沉积薄膜

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摘要

Thin films fabricated using the glancing angle deposition technique have a porous microstructure consisting of freestanding columns. Many promising applications of such thin films require that the columns be arranged in periodic arrays using substrate topographies-so-called seed layers-that enforce controlled film nucleation. In this paper, we present the optimized design, fabrication, and characteristics of periodically structured thin films, achieving highly uniform periodic film morphologies. We derive geometrical rules for designing substrate seed layers, and explain how to fabricate large area seed patterns with submicrometer features. Using negative-resist electron-beam lithography and laser direct write lithography, we have reached extremely high pattern densities. An experimental analysis is provided of seed-enforced nucleation and thin-film growth, showing that the elimination of film growth between seeds is crucial, and that the substrate seed layer geometry must match the intended film microstructure. Finally, we discuss the enhanced properties of periodically structured oblique angle thin films and their applications.
机译：使用掠角沉积技术制造的薄膜具有由独立柱组成的多孔微结构。这种薄膜的许多有希望的应用都要求使用强制控制膜成核的基底形貌（即所谓的种子层）将列以周期性阵列排列。在本文中，我们介绍了周期性结构化薄膜的优化设计，制造和特性，实现了高度均匀的周期性薄膜形态。我们推导了设计基底种子层的几何规则，并解释了如何制作具有亚微米级特征的大面积种子图案。使用负电阻电子束光刻和激光直接写入光刻，我们已经达到了极高的图案密度。提供了对晶种强化成核和薄膜生长的实验分析，表明消除晶种之间的膜生长至关重要，并且基质晶种层的几何形状必须与预期的膜微结构相匹配。最后，我们讨论了周期性结构的斜角薄膜的增强性能及其应用。

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