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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >A Nonlinear Lumped Equivalent Circuit Model for a Single Uncollapsed Square CMUT Cell
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A Nonlinear Lumped Equivalent Circuit Model for a Single Uncollapsed Square CMUT Cell

机译：单个未折叠方形CMUT单元的非线性集总等效电路模型

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摘要

An accurate nonlinear lumped equivalent circuit model is used for modeling of capacitive micromachined ultrasonic transducers (CMUTs). Finite-element analysis (FEA) is a powerful tool for the analysis of CMUT arrays with a small number of cells while with the harmonic balance (HB) analysis of the lumped equivalent circuit model, the entire behavior of a large-scale arbitrary CMUT array can be modeled in a very short time. Recently, an accurate nonlinear equivalent circuit model for uncollapsed single circular CMUT cells has been developed. However, the need for an accurate large-signal circuit model for CMUT cells with square membranes motivated us to produce a new nonlinear large-signal equivalent circuit model for uncollapsed CMUT cells. In this paper, using analytical calculations and FEA as the tuning tool, a precise large signal equivalent circuit model of square CMUT dynamics was developed and showed excellent agreement with finite-element modeling (FEM) results. Then, different CMUT single cells with square and circular membranes were fabricated using a standard sacrificial release process. Model predictions of resonance frequencies and displacements closely matched experimental vibrometer measurements. The framework presented here may prove valuable for future design and modeling of CMUT arrays with square membranes for ultrasound imaging and therapy applications.
机译：精确的非线性集总等效电路模型用于电容微加工超声换能器（CMUT）的建模。有限元分析（FEA）是用于分析具有少量单元的CMUT阵列的强大工具，同时通过集中等效电路模型的谐波平衡（HB）分析，可以分析大规模任意CMUT阵列的整个行为可以在很短的时间内建模。近来，已经开发出用于未塌陷的单个圆形CMUT单元的精确的非线性等效电路模型。但是，对于具有方形膜的CMUT电池，需要精确的大信号电路模型，这促使我们为未塌陷的CMUT电池生成新的非线性大信号等效电路模型。在本文中，使用分析计算和有限元分析作为调整工具，开发了一个精确的大信号等效平方电路CMUT动力学等效电路模型，并显示出与有限元建模（FEM）结果的极佳一致性。然后，使用标准的牺牲释放工艺制造具有方形和圆形膜的不同CMUT单细胞。共振频率和位移的模型预测与实验振动计的测量结果非常匹配。此处介绍的框架可能对未来设计和建模带有方形膜的CMUT阵列在超声成像和治疗应用中有价值。

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