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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Development of Self-Focusing Piezoelectric Composite Ultrasound Transducer Using Laser Engraving Technology
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Development of Self-Focusing Piezoelectric Composite Ultrasound Transducer Using Laser Engraving Technology

机译：利用激光雕刻技术开发自聚焦压电复合超声换能器

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摘要

Based on the Fresnel half-wave band interference and laser engraving, a high-frequency self-focusing piezoelectric composite ultrasound transducer (FPCUT) is presented in this article. The theoretical analysis was performed based on the concept of constructive interference of acoustic waves and the electromechanical response of piezoelectric composites. The calculated and simulation results showed that the FPCUT combined the advantages of the composite transducer and the plate self-focusing transducer and can achieve high electromechanical coupling coefficient (>0.66), low acoustic impedance (similar to 15 MRayl), high intensity, and short focal length. Furthermore, a 30-MHz self-focusing piezoelectric composite transducer prototype was fabricated and tested. It is composed of 11 lead zirconate titanates (PZTs) and ten epoxy annuluses. A UV engraving laser with a linewidth of 10 mu m was used in each of the PZTs to form the annuluses, and the kerf among the annuluses was filled with epoxy. The measured center frequency, bandwidth, and focal length were 27 MHz, 50.37%, and 3.7 mm, respectively. A vertical wire phantom was imaged using a fabricated transducer and a contrast flat transducer; the images showed significant improvement in the lateral resolution over a range of 9 mm. Because this self-focusing piezoelectric composite transducer was based on the precise laser engraving systems, the fabrication process was accurate and controllable, which enabled it to have good potential for medical imaging and industrial nondestructive testing applications.
机译：基于菲涅耳半波段干扰和激光雕刻，本文提出了一种高频自聚焦压电复合超声换能器（FPCUT）。基于声波的相长干涉和压电复合材料的机电响应的概念进行了理论分析。计算和仿真结果表明，FPCUT结合了复合换能器和平板自聚焦换能器的优点，可以实现高机电耦合系数（> 0.66），低声阻抗（类似于15 MRayl），强度高，短焦距。此外，制造并测试了一个30 MHz自聚焦压电复合换能器原型。它由11个钛酸锆钛酸铅（PZT）和10个环氧环空环组成。在每个PZT中使用线宽为10微米的UV雕刻激光形成环形物，并且环形物之间的切口用环氧树脂填充。测得的中心频率，带宽和焦距分别为27 MHz，50.37％和3.7 mm。使用制造的换能器和对比平面换能器对垂直导线幻像成像；图像显示了在9 mm范围内横向分辨率的显着改善。由于这种自聚焦压电复合换能器基于精确的激光雕刻系统，因此制造过程是精确且可控的，这使其在医学成像和工业无损检测应用中具有良好的潜力。

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