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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Bilateral CMUT Cells and Arrays: Equivalent Circuits, Diffraction Constants, and Substrate Impedance
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Bilateral CMUT Cells and Arrays: Equivalent Circuits, Diffraction Constants, and Substrate Impedance

机译：双边CMUT单元和阵列：等效电路，衍射常数和基板阻抗

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摘要

We introduce the large-signal and small-signal equivalent circuit models for a capacitive micromachined ultrasonic transducer (CMUT) cell, which has radiating plates on both sides. We present the diffraction coefficient of baffled and unbaffled CMUT cells. We show that the substrate can be modeled as a very thick radiating plate on one side, which can be readily incorporated in the introduced model. In the limiting case, the reactance of this backing impedance is entirely compliant for substrate materials with a Poisson’s ratio less than 1/3. We assess the dependence of the radiation performance of the front plate on the thickness of the back plate by simulating an array of bilateral CMUT cells. We find that the small-signal linear model is sufficiently accurate for large-signal excitation, for the purpose of the determining the fundamental component. To determine harmonic distortion, the large-signal model must be used with harmonic balance analysis. Rayleigh-Bloch waves are excited at the front and back surfaces similar to conventional CMUT arrays.
机译：我们介绍了电容微机械超声换能器（CMUT）单元的大信号和小信号等效电路模型，该单元在两侧都有散热板。我们介绍了无挡板和无挡板CMUT细胞的衍射系数。我们显示了可以将基板建模为一侧很厚的散热板，可以很容易地将其引入到引入的模型中。在极限情况下，背衬阻抗的电抗完全符合泊松比小于1/3的基板材料。我们通过模拟双边CMUT单元阵列评估前板辐射性能对后板厚度的依赖性。我们发现，为了确定基本分量，小信号线性模型对于大信号激励是足够准确的。为了确定谐波失真，必须将大信号模型与谐波平衡分析一起使用。类似于传统的CMUT阵列，在前后表面激发瑞利-布洛克波。

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