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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >A negative-capacitance equivalent circuit model for parallel-plate capacitive-gap-transduced micromechanical resonators
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A negative-capacitance equivalent circuit model for parallel-plate capacitive-gap-transduced micromechanical resonators

机译：平行板电容隙转换的微机械谐振器的负电容等效电路模型

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摘要

A small-signal equivalent circuit for parallelplate capacitive-gap-transduced micromechanical resonators is introduced that employs negative capacitance to model the dependence of resonance frequency on electrical stiffness in a way that facilitates circuit analysis, that better elucidates the mechanisms behind certain potentially puzzling measured phenomena, and that inspires circuit topologies that maximize performance in specific applications. For this work, a micromechanical disk resonator serves as the vehicle with which to derive the equivalent circuits for both radial-contour and wine-glass modes, which are then used in circuit simulations (via simulation) to match measurements on actual fabricated devices. The new circuit model not only correctly predicts the dependence of electrical stiffness on the impedances loading the input and output electrodes of parallel-plate capacitive- gap-transduced micromechanical device, but does so in a visually intuitive way that identifies current drive as most appropriate for applications that must be stable against environmental perturbations, such as acceleration or power supply variations. Measurements on fabricated devices confirm predictions by the new model of up to 4?? improvement in frequency stability against dc-bias voltage variations for contour- mode disk resonators as the resistance loading their ports increases. By enhancing circuit visualization, this circuit model makes more obvious the circuit design procedures and topologies most beneficial for certain mechanical circuits, e.g., filters and oscillators.
机译：引入了一种用于平行板电容隙转换的微机械谐振器的小信号等效电路，该电路使用负电容来建模谐振频率对电刚度的依赖性，从而有助于电路分析，从而更好地阐明某些可能令人费解的被测现象背后的机制，这激发了在特定应用中最大化性能的电路拓扑。对于这项工作，微机械圆盘谐振器用作工具，用于导出径向轮廓和酒杯模式的等效电路，然后将其用于电路仿真（通过仿真）以匹配实际制造设备上的测量。新的电路模型不仅可以正确预测电刚度对平行板电容式间隙转换微机械设备的输入和输出电极加载的阻抗的依赖性，而且还可以通过直观的直观方式将电流驱动识别为最适合必须对环境干扰稳定的应用，例如加速或电源变化。在装配好的设备上进行的测量证实了新模型中多达4英寸的预测值。随着负载其端口的电阻的增加，针对轮廓模式盘式谐振器的频率稳定性针对直流偏置电压变化的改善。通过增强电路的可视化，该电路模型使对于某些机械电路（例如滤波器和振荡器）最有利的电路设计过程和拓扑结构变得更加明显。

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