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Analysis of signals propagating in a phononic crystal PZT layer deposited on a silicon substrate

机译:分析在硅基板上沉积的声子晶体PZT层中传播的信号

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摘要

The design of a stop-band filter constituted by a periodically patterned lead zirconate titanate (PZT) layer, polarized along its thickness, deposited on a silicon substrate and sandwiched between interdigitated electrodes for emission/reception of guided elastic waves, is investigated. The filter characteristics are theoretically evaluated by using finite element simulations: dispersion curves of a patterned PZT layer with a specific pattern geometry deposited on a silicon substrate present an absolute stop band. The whole structure is modeled with realistic conditions, including appropriate interdigitated electrodes to propagate a guided mode in the piezoelectric layer. A robust method for signal analysis based on the Gabor transform is applied to treat transmitted signals; extract attenuation, group delays, and wave number variations versus frequency; and identify stop-band filter characteristics.
机译:研究了一种阻带滤波器的设计,该滤波器由周期性图案化的锆钛酸铅钛酸酯(PZT)层构成,该层沿其厚度极化,沉积在硅基板上并夹在叉指式电极之间,用于发射/接收引导的弹性波。理论上,通过使用有限元模拟来评估滤波器的特性:图案化的PZT层的色散曲线具有沉积在硅基板上的特定图案几何形状,呈现出绝对阻带。整个结构是在实际条件下建模的,其中包括在压电层中传播引导模式的合适的叉指电极。一种基于Gabor变换的鲁棒信号分析方法被用于处理发射信号。提取衰减,群时延以及波数与频率的关系;并确定阻带滤波器的特性。

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