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首页> 外文期刊>Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on >Langasite surface acoustic wave sensors: Fabrication and testing
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Langasite surface acoustic wave sensors: Fabrication and testing

机译：兰加斯特表面声波传感器：制造和测试

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摘要

We report on the development of harsh-environment surface acoustic wave sensors for wired and wireless operation. Surface acoustic wave devices with an interdigitated transducer emitter and multiple reflectors were fabricated on langasite substrates. Both wired and wireless temperature sensing was demonstrated using radar-mode (pulse) detection. Temperature resolution of better than ±0.5°C was achieved between 200°C and 600°C. Oxygen sensing was achieved by depositing a layer of ZnO on the propagation path. Although the ZnO layer caused additional attenuation of the surface wave, oxygen sensing was accomplished at temperatures up to 700°C. The results indicate that langasite SAW devices are a potential solution for harsh-environment gas and temperature sensing.
机译：我们报告了用于有线和无线操作的恶劣环境表面声波传感器的发展情况。带有叉指式换能器发射器和多个反射器的表面声波装置是在浮石基体上制造的。使用雷达模式（脉冲）检测演示了有线和无线温度感测。在200°C至600°C之间实现了优于±0.5°C的温度分辨率。氧气感应是通过在传播路径上沉积一层ZnO来实现的。尽管ZnO层会引起表面波的额外衰减，但氧感测是在最高700°C的温度下完成的。结果表明，蓝铁矿声表面波器件是用于恶劣环境气体和温度传感的潜在解决方案。

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