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首页> 外文期刊>Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on >Determination and experimental verification of high-temperature SAW orientations on langatate
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Determination and experimental verification of high-temperature SAW orientations on langatate

机译：硅酸盐上高温SAW取向的测定和实验验证

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摘要

Langatate (LGT) is a member of the langasite family of crystals appropriate for high-temperature frequency control and sensing applications. This paper identifies multiple LGT SAW orientations for use at high temperature, specifically in the 400°C to 900°C range. Orientations with low sensitivity to temperature are desired for frequency control devices and many sensors, conversely large temperature sensitivity is a benefit for temperature sensors. The LGT SAW temperature behavior has been calculated for orientations sweeping the Euler angles (0°,Θ,ψ), (90°,Θ,ψ), and (Φ,90°,ψ), based on newly identified high-temperature elastic constants and temperature coefficients for this material. The temperature coefficient of delay (TCD) and total frequency change over the temperature range were analyzed from 400°C to 900°C. Multiple SAW orientations were identified with zero-TCD between 400°C and 500°C. Although no orientations that have turn-over temperatures above 500°C were identified, several have low frequency variation with temperature, of the order of -0.8% over the range 400°C to 800°C. Temperature-sensitive orientations with TCD up to 75 ppm/°C at 900°C were identified, with potential for high-temperature sensor applications. The reported predictions are shown to agree with measured behavior of LGT SAW delay lines fabricated along 6 orientations in the (90°,23°,ψ) plane. In addition, this work demonstrates that concurrently operated LGT SAW devices fabricated on the same wafer provide means of temperature sensing. In particular, the measured frequency difference between delay lines oriented along (90°,23°,0°) and (90°, 23°, 48°) has fractional temperature sensitivity that ranges from -172 ppm/°C at 25°C to -205 ppm/°- C at 900°C.
机译：Langatate（LGT）是适用于高温频率控制和传感应用的langasite晶体家族的成员。本文确定了在高温下使用的多种LGT SAW取向，尤其是在400°C至900°C的范围内。对于频率控制设备和许多传感器，希望对温度的敏感性低的取向，相反，温度敏感性大对温度传感器是有益的。根据新近确定的高温弹性系数，计算了扫描欧拉角（0°，Θ，ψ），（90°，Θ，ψ）和（Φ，90°，ψ）的取向的LGT SAW温度行为该材料的常数和温度系数。分析了温度范围从400°C至900°C的延迟温度系数（TCD）和总频率变化。在400°C至500°C的温度范围内，零TCD可以识别多个SAW方向。尽管没有发现翻转温度高于500°C的方向，但有些方向在400°C至800°C的范围内具有随温度变化的低频变化，约为-0.8％。确定了在900°C时TCD高达75 ppm /°C的温度敏感方向，对高温传感器应用具有潜力。结果表明，所报道的预测与沿（90°，23°，ψ）平面中的6个方向制造的LGT SAW延迟线的测量行为一致。此外，这项工作证明了在同一晶片上同时运行的LGT SAW器件可提供温度传感的方法。特别是，沿（90°，23°，0°）和（90°，23°，48°）定向的延迟线之间测得的频率差在25°C时的分数温度灵敏度范围为-172 ppm /°C在900°C时达到-205 ppm /°C。

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